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Title: Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH 3
Award ID(s):
1825938 1665191
PAR ID:
10138536
Author(s) / Creator(s):
 ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
38
Issue:
3
ISSN:
0734-2101
Page Range / eLocation ID:
Article No. 033401
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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