Ozone, O3, is a strong oxidizing agent often used for water purification. O3is typically produced in dielectric barrier discharges (DBDs) by electron-impact dissociation of O2, followed by three-body association reactions between O and O2. Previous studies on O3formation in low-temperature plasma DBDs have shown that O3concentrations can drop to nearly zero after continued operation, termed the ozone-zero phenomenon (OZP). Including small (<4%) admixtures of N2can suppress this phenomenon and increase the O3production relative to using pure O2in spite of power deposition being diverted from O2to N2and the production of nitrogen oxides, N
- Award ID(s):
- 1701121
- NSF-PAR ID:
- 10145297
- Date Published:
- Journal Name:
- Proc. SPIE 10589, Advanced Etch Technology for Nanopatterning VII
- Volume:
- 05890J
- Page Range / eLocation ID:
- 18
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1117/12.2297502
