An official website of the United States government
This paper presents the line-edge-roughness (LER) characterization of the photomask patterns and the lithography-printed patterns by enhanced knife edge interferometry (EKEI) that measures the interferometric fringe patterns occurring when the light is incident on the patterned edge. The LER is defined as a geometric deviation of a feature edge from an ideal sharp edge. The Fresnel number-based computational model was developed to simulate the fringe patterns according to the LER conditions. Based on the computational model, the photomask patterns containing LER features were designed and fabricated. Also, the patterns were printed on the glass wafer by photolithography. The interferometric fringe patterns of those two groups of patterns were measured and compared with the simulation results. By using the cross-correlation method, the LER effects on the fringe patterns were characterized. The simulation and experimental results showed good agreement. It showed that the amplitude of the fringe pattern decreases as the LER increases in both cases: photomask patterns and printed wafer patterns. As a result, the EKEI and its analysis methods showed the potential to be used in photomask design and pattern metrology, and inspection for advancing semiconductor manufacturing processes.
more »
« less
Detection technique effect on rotational Doppler measurements
There are two established methods for measuring rotational Doppler shift: (1) heterodyne and (2) fringe. We identify a key distinction, that only the heterodyne method is sensitive to the rotating object’s phase, which results in significant differences in the signal-to-noise ratio (SNR) when measuring multiple rotating particles. When used to measure randomly distributed rotating particles, the fringe method produces its strongest SNR when a single particle is present and its SNR tends to zero as the number of particles increases, whereas the heterodyne method’s SNR increases proportionally to the number of particles in the beam.
more »
« less
- PAR ID:
- 10146859
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Letters
- Volume:
- 45
- Issue:
- 9
- ISSN:
- 0146-9592; OPLEDP
- Format(s):
- Medium: X Size: Article No. 2636
- Size(s):
- Article No. 2636
- Sponsoring Org:
- National Science Foundation
More Like this
-
-
Abstract This paper introduces a novel wafer-edge quality inspection method based on analysis of curved-edge diffractive fringe patterns, which occur when light is incident and diffracts around the wafer edge. The proposed method aims to identify various defect modes at the wafer edges, including particles, chipping, scratches, thin-film deposition, and hybrid defect cases. The diffraction patterns formed behind the wafer edge are influenced by various factors, including the edge geometry, topography, and the presence of defects. In this study, edge diffractive fringe patterns were obtained from two approaches: (1) a single photodiode collected curved-edge interferometric fringe patterns by scanning the wafer edge and (2) an imaging device coupled with an objective lens captured the fringe image. The first approach allowed the wafer apex characterization, while the second approach enabled simultaneous localization and characterization of wafer quality along two bevels and apex directions. The collected fringe patterns were analyzed by both statistical feature extraction and wavelet transform; corresponding features were also evaluated through logarithm approximation. In sum, both proposed wafer-edge inspection methods can effectively characterize various wafer-edge defect modes. Their potential lies in their applicability to online wafer metrology and inspection applications, thereby contributing to the advancement of wafer manufacturing processes.more » « less
-
We show that the reflection interference fringe (RIF) is formed on a screen far away from the microdroplets placed on a prism-based substrate, which have low contact angles and thin droplet heights, caused by the dual convex–concave profile of the droplet, not a pure convex profile. The geometric formulation shows that the interference fringes are caused by the optical path difference when the reflected rays from the upper convex profile at the droplet–air interface interfere with reflection from the lower concave profile at oblique angles lower than the critical angle. Analytic solutions are obtained for the droplet height and the contact angle out of the fringe number and the fringe radius in RIF from the geometric formulation. Furthermore, the ray tracing simulation is conducted using the custom-designed code. The geometric formulation and the ray tracing show excellent agreement with the experimental observation in the relation between the droplet height and the fringe number and the relation between the contact angle and the fringe radius. This study is remarkable as the droplet's dual profile cannot be easily observed with the existing techniques. However, the RIF technique can effectively verify the existence of a dual profile of the microdroplets in a simple setup. In this work, the RIF technique is successfully developed as a new optical diagnostic technique to determine the microdroplet features, such as the dual profile, the height, the contact angle, the inflection point, and the precursor film thickness, by simply measuring the RIF patterns on the far-field screen.more » « less
-
Statistical and Computational Complexities of BFGS Quasi-Newton Method for Generalized Linear ModelsThe gradient descent (GD) method has been used widely to solve parameter estimation in generalized linear models (GLMs), a generalization of linear models when the link function can be non-linear. In GLMs with a polynomial link function, it has been shown that in the high signal-to-noise ratio (SNR) regime, due to the problem's strong convexity and smoothness, GD converges linearly and reaches the final desired accuracy in a logarithmic number of iterations. In contrast, in the low SNR setting, where the problem becomes locally convex, GD converges at a slower rate and requires a polynomial number of iterations to reach the desired accuracy. Even though Newton's method can be used to resolve the flat curvature of the loss functions in the low SNR case, its computational cost is prohibitive in high-dimensional settings as it is $$\mathcal{O}(d^3)$$, where $$d$$ the is the problem dimension. To address the shortcomings of GD and Newton's method, we propose the use of the BFGS quasi-Newton method to solve parameter estimation of the GLMs, which has a per iteration cost of $$\mathcal{O}(d^2)$$. When the SNR is low, for GLMs with a polynomial link function of degree $$p$$, we demonstrate that the iterates of BFGS converge linearly to the optimal solution of the population least-square loss function, and the contraction coefficient of the BFGS algorithm is comparable to that of Newton's method. Moreover, the contraction factor of the linear rate is independent of problem parameters and only depends on the degree of the link function $$p$$. Also, for the empirical loss with $$n$$ samples, we prove that in the low SNR setting of GLMs with a polynomial link function of degree $$p$$, the iterates of BFGS reach a final statistical radius of $$\mathcal{O}((d/n)^{\frac{1}{2p+2}})$$ after at most $$\log(n/d)$$ iterations. This complexity is significantly less than the number required for GD, which scales polynomially with $(n/d)$.more » « less
-
null (Ed.)A new hyperspectral Raman imaging technique is described using a spatial heterodyne Raman spectrometer (SHRS) and a microlens array (MLA). The new technique enables the simultaneous acquisition of Raman spectra over a wide spectral range at spatially isolated locations within two spatial dimensions ( x, y) using a single exposure on a charge-coupled device (CCD) or other detector types such as a complementary metal-oxide semiconductor (CMOS) detector. In the SHRS system described here, a 4 × 4 mm MLA with 1600, 100 µm diameter lenslets is used to image the sample, with each lenslet illuminating a different region of the SHRS diffraction gratings and forming independent fringe images on the CCD. The fringe images from each lenslet contain the fully encoded Raman spectrum of the region of the sample “seen” by the lenslet. Since the SHRS requires no moving parts, all fringe images can be measured simultaneously with a single detector exposure, and in principle using a single laser shot, in the case of a pulsed laser. In this proof of concept paper, hyperspectral Raman spectra of a wide variety of heterogeneous samples are used to characterize the technique in terms of spatial and spectral resolution tradeoffs. It is shown that the spatial resolution is a function of the diameter of the MLA lenslets, while the number of spatial elements that can be resolved is equal to the number of MLA lenslets that can be imaged onto the SHRS detector. The spectral resolution depends on the spatial resolution desired, and the number of grooves illuminated on both diffraction gratings by each lenslet, or combination of lenslets in cases where they are grouped.more » « less
