Herein, we report the design and synthesis of a block copolymer (BCP) with a high Flory–Huggins interaction parameter to access 10 nm feature sizes for potential lithographic applications. The investigated BCP is poly[(2‐methyl‐2‐oxazoline)‐
- Award ID(s):
- 1905912
- NSF-PAR ID:
- 10147358
- Date Published:
- Journal Name:
- Soft Matter
- Volume:
- 16
- Issue:
- 12
- ISSN:
- 1744-683X
- Page Range / eLocation ID:
- 3005 to 3014
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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