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Title: Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO 2
Award ID(s):
1704151
NSF-PAR ID:
10147516
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Chemistry of Materials
Volume:
31
Issue:
13
ISSN:
0897-4756
Page Range / eLocation ID:
4793 to 4804
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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