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1. Quasi-vertical β-Ga2O3 Schottky diodes on sapphire using all-LPCVD growth and plasma-free Ga-assisted etching

   https://doi.org/10.1063/5.0280191  

   Khan, Saleh_Ahmed; Ibreljic, Ahmed; Bhuiyan, A_F_M_Anhar_Uddin (September 2025, APL Electronic Devices)

   This work demonstrates quasi-vertical β-Ga2O3 Schottky barrier diodes (SBDs) fabricated on c-plane sapphire substrates using an all-low-pressure chemical vapor deposition (LPCVD)-based, plasma-free process flow that integrates both epitaxial growth of a high-quality β-Ga2O3 heteroepitaxial film with in situ Ga-assisted β-Ga2O3 etching. A 6.3 μm thick (2̄01) oriented β-Ga2O3 epitaxial layer structure was grown on c-plane sapphire with 6° miscut, comprising a moderately Si-doped (2.1 × 1017 cm−3) 3.15 μm thick drift layer and a heavily doped (1 × 1019 cm−3) contact layer on an unintentionally doped buffer layer. Mesa isolation was achieved via Ga-assisted plasma-free LPCVD etching, producing ∼60° inclined mesa sidewalls with an etch depth of 3.6 μm. The fabricated SBDs exhibited excellent forward current–voltage characteristics, including a turn-on voltage of 1.22 V, an ideality factor of 1.29, and a Schottky barrier height of 0.83 eV. The minimum differential specific on-resistance was measured to be 8.6 mΩ cm2, and the devices demonstrated high current density capability (252 A/cm2 at 5 V). Capacitance–voltage analysis revealed a net carrier concentration of 2.1 × 1017 cm−3, uniformly distributed across the β-Ga2O3 drift layer. Temperature-dependent J–V–T measurements, conducted from 25 to 250 °C, revealed thermionic emission-dominated transport with strong thermal stability. The Schottky barrier height increased from 0.80 to 1.16 eV, and the ideality factor rose modestly from 1.31 to 1.42 over this temperature range. Reverse leakage current remained low, increasing from ∼5 × 10−6 A/cm2 at 25 °C to ∼1 × 10−4 A/cm2 at 250 °C, with the Ion/Ioff ratio decreasing from ∼1 × 107 to 5 × 105. The devices achieved breakdown voltages ranging from 73 to 100 V, corresponding to parallel-plate electric field strengths of 1.66–1.94 MV/cm. These results highlight the potential of LPCVD-grown and etched β-Ga2O3 devices for high-performance, thermally resilient power electronics applications. 

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2. MOCVD-grown β-Ga2O3 as a Gate Dielectric on AlGaN/GaN-Based Heterojunction Field Effect Transistor

   https://doi.org/10.3390/cryst13020231  

   Hasan, Samiul; Jewel, Mohi Uddin; Crittenden, Scott R.; Lee, Dongkyu; Avrutin, Vitaliy; Özgür, Ümit; Morkoç, Hadis; Ahmad, Iftikhar (February 2023, Crystals)

   We report the electrical properties of Al0.3Ga0.7N/GaN heterojunction field effect transistor (HFET) structures with a Ga2O3 passivation layer grown by metal–organic chemical vapor deposition (MOCVD). In this study, three different thicknesses of β-Ga2O3 dielectric layers were grown on Al0.3Ga0.7N/GaN structures leading to metal-oxide-semiconductor-HFET or MOSHFET structures. X-ray diffraction (XRD) showed the (2¯01) orientation peaks of β-Ga2O3 in the device structure. The van der Pauw and Hall measurements yield the electron density of ~ 4 × 1018 cm−3 and mobility of ~770 cm2V−1s−1 in the 2-dimensional electron gas (2DEG) channel at room temperature. Capacitance–voltage (C-V) measurement for the on-state 2DEG density for the MOSHFET structure was found to be of the order of ~1.5 × 1013 cm−2. The thickness of the Ga2O3 layer was inversely related to the threshold voltage and the on-state capacitance. The interface charge density between the oxide and Al0.3Ga0.7N barrier layer was found to be of the order of ~1012 cm2eV−1. A significant reduction in leakage current from ~10−4 A/cm2 for HFET to ~10−6 A/cm2 for MOSHFET was observed well beyond pinch-off in the off-stage at -20 V applied gate voltage. The annealing at 900° C of the MOSHFET structures revealed that the Ga2O3 layer was thermally stable at high temperatures resulting in insignificant threshold voltage shifts for annealed samples with respect to as-deposited (unannealed) structures. Our results show that the MOCVD-gown Ga2O3 dielectric layers can be a strong candidate for stable high-power devices. 

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3. Exceptional Repetitive-Short-Circuit Robustness of Vertical GaN Fin-JFET at High Voltage

   https://doi.org/10.1109/ISPSD49238.2022.9813618  

   Zhang, R.; Liu, J.; Li, Q.; Pidaparthi, S.; Edwards, A.; Drowley, C.; Zhang, Y. (May 2022, Exceptional Repetitive-Short-Circuit Robustness of Vertical GaN Fin-JFET at High Voltage)

   The limited short circuit (SC) capability of GaN high-electron-mobility transistors (HEMTs) has become a critical concern for their adoption in many power applications. Recently, breakthrough SC robustness was demonstrated in a 650-V rated vertical GaN Fin-JFET with a short circuit withstanding time of over 30 µs at 400 V bus voltage (V BUS ), showing great potential for automotive powertrain and grid applications. This work presents the first study on the repetitive SC robustness of this GaN Fin-JFET at a V BUS of 400 V and 600 V. The GaN Fin-JFET survived 30,000 cycles of 400 V, 10 µs SC stresses without any degradation in device characteristics. At a 600 V V BUS , it survived over 8,000 cycles of 10 µs SC stresses before an open-circuit failure. This open-circuit failure signature allows the GaN Fin-JFET to retain its avalanche breakdown voltage and is highly desirable for system safety. Besides, an increase in gate leakage was observed during the 600 V repetitive test, which can be used as a precursor to predict device failure. As far as we know, this is the first report of an exceptional repetitive SC robustness in a power transistor at a V BUS close to its rated voltage. 

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4. 10 kV GaN Power Diodes and Transistors with Performance beyond SiC Limit

   https://doi.org/10.1109/EDTM53872.2022.9797920  

   Zhang, Yuhao; Xiao, Ming; Ma, Yunwei; Cheng, Kai (March 2022, 10 kV GaN Power Diodes and Transistors with Performance beyond SiC Limit)

   Medium-voltage (MV) power electronic devices are widely used in renewable energy processing, electric grids, pulse power systems, etc. Current MV devices are mainly made of Si and SiC. This paper presents our recent efforts in developing a new generation of MV devices based on the multi-channel AlGaN/GaN platform and many new device designs involving charge balance, fin, and Cascode. The specific on-resistance of our 10 kV-class GaN Schottky barrier diodes and normally-OFF transistors is ~40 mΩ•cm 2 , rendering a Baliga’s figure of merit exceeding the 1-D unipolar SiC limits. We show the great promise of GaN in medium and high-voltage power applications. 

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5. Enhanced breakdown voltage in β -Ga2O3 Schottky diodes via fast neutron irradiation and electro-thermal annealing

   https://doi.org/10.1063/5.0297242  

   Khan, Saleh Ahmed; Saha, Sudipto; Ibreljic, Ahmed; Margiotta, Stephen; Liu, Jiawei; Amir, Walid; Chakraborty, Surajit; Singisetti, Uttam; Bhuiyan, A_F_M_Anhar Uddin (December 2025, Applied Physics Letters)

   This study demonstrates a substantial enhancement of breakdown voltage in β-Ga2O3 Schottky barrier diodes through an approach that combines fast neutron irradiation with controlled post-irradiation electro-thermal annealing. Devices irradiated with 1 MeV neutrons at a high fluence of 1 × 1015 n/cm2 initially exhibited substantial degradation, including a drastic reduction in on-current and an increase in on-resistance. Electro-thermal testing, conducted through simultaneous current–voltage measurements while heating the devices up to 250 °C, resulted in significant recovery. After four cycles of electro-thermal testing, the devices demonstrated significant improvements in performance, with a substantial recovery of on-current and a reduction in on-resistance compared to the post-radiation condition, approaching pre-radiation levels. Most recovery occurred during the first two cycles, with diminishing improvements thereafter, indicating that thermally responsive radiation-induced traps were largely mitigated early in the process. Capacitance–voltage measurements revealed a substantial reduction in net carrier concentration, decreasing from 3.2 × 1016 cm−3 pre-radiation to 5.5 × 1015 cm−3 after the first electro-thermal testing cycle, indicating an over 82% reduction. Following the third cycle, the carrier concentration partially recovered to 9.9 × 1015 cm−3, reflecting a carrier removal rate of ∼22 cm−1. The breakdown voltage (Vbr) exhibited a remarkable enhancement, increasing from approximately 300 V to 1.28 kV (a ∼325% improvement) after the first electro-thermal testing, which can be attributed to the reduction in net carrier concentration by compensating radiation-induced traps. Subsequent testing reduced Vbr slightly to 940 V due to partial recovery of carrier concentration, but it remained significantly higher than pre-radiation levels. These findings demonstrate the potential of combining neutron irradiation with electro-thermal annealing to significantly enhance the voltage-blocking capability of β-Ga2O3 power devices, making them strong candidates for high-power applications in radiation-intense environments. 

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