We demonstrate simultaneous figuring and surface finishing of glass using a femtosecond laser. For the first time, to the best of our knowledge, we have achieved deterministic material removal with nanometer precision and maintained sub-nanometer surface roughness without inducing any mid-spatial-frequency errors to the initial surface. A dynamic pulse propagation model is established to predict the interaction process, including plasma generation and surface temperature. The interactive modeling and the experiments enable the selection of a set of laser parameters to achieve controllable optical figuring and finishing. This demonstration shows the potential for using femtosecond lasers for advanced freeform optic forming, finishing, and reduction of detrimental mid-spatial-frequency errors, and laser-ablation-based patterning used for fabrication of integrated photonics and lasers.
- PAR ID:
- 10161185
- Date Published:
- Journal Name:
- Optical materials express
- Volume:
- 9
- Issue:
- 11
- ISSN:
- 2159-3930
- Page Range / eLocation ID:
- 4165-4177
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
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- The DOI is not currently available.
