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Title: A stepped-sine curve-fit algorithm for finding cantilever resonance shifts in AFM
Atomic force microscopes (AFMs) are used not only to image with nanometer-scale resolution, but also to nanofabricate structures on a surface using methods such as dip-pen nanolithography (DPN). DPN involves using the tip of the AFM to deposit a small amount of material on the surface. Typically, this process is done in open loop, leading to large variations in the amount of material transferred. One of the first steps to closing this loop is to be able to accurately and rapidly measure the amount of deposition. This can be done by measuring the change in the resonance frequency of the cantilever before and after a write as that shift is directly related to the change in mass on the cantilever. Currently, this is done using a thermal-based system identification, a technique which uses the natural Brownian excitation of the cantilever as a white noise excitation combined with a fast Fourier transform to extract a Bode plot. However, thermal-based techniques do not have a good signal to noise ratio at typical cantilever resonance frequencies and thus do not provide the needed resolution in the DPN application. Here we develop a scheme that iteratively uses a stepped-sine approach. At each step of more » the iteration, three frequencies close to the approximate location of the resonance are injected and used to fit a model of the magnitude of the transfer function. The identified peak is used to select three new frequencies in a smaller range in a binary search to reduce the uncertainty of the measured resonance peak location. The scheme is demonstrated through simulation and shown to produce an accuracy of better than 0.5 Hz on a cantilever with a 14 kHz resonance in a physically realistic noise scenario. « less
Authors:
; ; ;
Award ID(s):
1661412
Publication Date:
NSF-PAR ID:
10186131
Journal Name:
2019 American Control Conference (ACC)
Page Range or eLocation-ID:
4368 to 4373
Sponsoring Org:
National Science Foundation
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The breast corpus subset should be released by November 2021. By December 2021 we should also release the unannotated FCCC data. We are currently annotating urinary tract data as well. We expect to release about 5,600 processed TUH slides in this subset. We have an additional 53,000 unprocessed TUH slides digitized. Corpora of this size will stimulate the development of a new generation of deep learning technology. In clinical settings where resources are limited, an assistive diagnoses model could support pathologists’ workload and even help prioritize suspected cancerous cases. ACKNOWLEDGMENTS This material is supported by the National Science Foundation under grants nos. CNS-1726188 and 1925494. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. REFERENCES [1] N. Shawki et al., “The Temple University Digital Pathology Corpus,” in Signal Processing in Medicine and Biology: Emerging Trends in Research and Applications, 1st ed., I. Obeid, I. Selesnick, and J. Picone, Eds. New York City, New York, USA: Springer, 2020, pp. 67 104. https://www.springer.com/gp/book/9783030368432. [2] J. Picone, T. Farkas, I. Obeid, and Y. Persidsky, “MRI: High Performance Digital Pathology Using Big Data and Machine Learning.” Major Research Instrumentation (MRI), Division of Computer and Network Systems, Award No. 1726188, January 1, 2018 – December 31, 2021. https://www. isip.piconepress.com/projects/nsf_dpath/. [3] A. Gulati et al., “Conformer: Convolution-augmented Transformer for Speech Recognition,” in Proceedings of the Annual Conference of the International Speech Communication Association (INTERSPEECH), 2020, pp. 5036-5040. https://doi.org/10.21437/interspeech.2020-3015. [4] C.-J. Wu et al., “Machine Learning at Facebook: Understanding Inference at the Edge,” in Proceedings of the IEEE International Symposium on High Performance Computer Architecture (HPCA), 2019, pp. 331–344. https://ieeexplore.ieee.org/document/8675201. [5] I. Caswell and B. Liang, “Recent Advances in Google Translate,” Google AI Blog: The latest from Google Research, 2020. [Online]. Available: https://ai.googleblog.com/2020/06/recent-advances-in-google-translate.html. [Accessed: 01-Aug-2021]. [6] V. Khalkhali, N. Shawki, V. Shah, M. Golmohammadi, I. Obeid, and J. Picone, “Low Latency Real-Time Seizure Detection Using Transfer Deep Learning,” in Proceedings of the IEEE Signal Processing in Medicine and Biology Symposium (SPMB), 2021, pp. 1 7. https://www.isip. piconepress.com/publications/conference_proceedings/2021/ieee_spmb/eeg_transfer_learning/. [7] J. Picone, T. Farkas, I. Obeid, and Y. Persidsky, “MRI: High Performance Digital Pathology Using Big Data and Machine Learning,” Philadelphia, Pennsylvania, USA, 2020. https://www.isip.piconepress.com/publications/reports/2020/nsf/mri_dpath/. [8] I. Hunt, S. Husain, J. Simons, I. Obeid, and J. Picone, “Recent Advances in the Temple University Digital Pathology Corpus,” in Proceedings of the IEEE Signal Processing in Medicine and Biology Symposium (SPMB), 2019, pp. 1–4. https://ieeexplore.ieee.org/document/9037859. [9] A. P. Martinez, C. Cohen, K. Z. Hanley, and X. (Bill) Li, “Estrogen Receptor and Cytokeratin 5 Are Reliable Markers to Separate Usual Ductal Hyperplasia From Atypical Ductal Hyperplasia and Low-Grade Ductal Carcinoma In Situ,” Arch. Pathol. Lab. Med., vol. 140, no. 7, pp. 686–689, Apr. 2016. https://doi.org/10.5858/arpa.2015-0238-OA.« less
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