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Title: A Differential Burn-in Policy Considering Nonhomogeneous Distribution of Spatial Defects in Semiconductor Manufacturing
This paper proposes a differential burn-in policy that considers the spatial nonhomogeneous distribution of defects in semiconductor manufacturing. Due to the nonhomogeneous distribution of spatial defects, devices at different locations on a semiconductor wafer may exhibit different probabilities of being defective. Unlike conventional burn-in policies, which subject all devices to the same burn-in test, the differential burn-in policy can take different actions for different devices, i.e., acceptance without burn-in, rejection without burn-in, or burn-in with a certain duration. A mixed integer nonlinear programming model is developed to find the cost-optimal decisions. A numerical example is used to demonstrate the potential application of the proposed burn-in policy.  more » « less
Award ID(s):
1633580 1633500
PAR ID:
10197648
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
2020 Asia-Pacific International Symposium on Advanced Reliability and Maintenance Modeling (APARM)
Page Range / eLocation ID:
1 to 4
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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