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This paper proposes a differential burn-in policy that considers the spatial nonhomogeneous distribution of defects in semiconductor manufacturing. Due to the nonhomogeneous distribution of spatial defects, devices at different locations on a semiconductor wafer may exhibit different probabilities of being defective. Unlike conventional burn-in policies, which subject all devices to the same burn-in test, the differential burn-in policy can take different actions for different devices, i.e., acceptance without burn-in, rejection without burn-in, or burn-in with a certain duration. A mixed integer nonlinear programming model is developed to find the cost-optimal decisions. A numerical example is used to demonstrate the potential application of the proposed burn-in policy.more » « less
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Yuan, Tao; Bae, Suk Joo; Kuo, Yue (, IEEE Transactions on Reliability)null (Ed.)
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Gao, Baizhen; Gao, Yong; Kuo, Yue; Yuan, Tao (, ECS Transactions)
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Yuan, T; Zhu, X; Kuo, Y (, ASIA PACIFIC CONFERENCE OF THE PROGNOSTICS AND HEALTH MANAGEMENT SOCIETY 2017)
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