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Title: Sensor Egregium—An Atomic Force Microscope Sensor for Continuously Variable Resonance Amplification
Abstract Numerous nanometrology techniques concerned with probing a wide range of frequency-dependent properties would benefit from a cantilevered sensor with tunable natural frequencies. In this work, we propose a method to arbitrarily tune the stiffness and natural frequencies of a microplate sensor for atomic force microscope applications, thereby allowing resonance amplification at a broad range of frequencies. This method is predicated on the principle of curvature-based stiffening. A macroscale experiment is conducted to verify the feasibility of the method. Next, a microscale finite element analysis is conducted on a proof-of-concept device. We show that both the stiffness and various natural frequencies of the device can be controlled through applied transverse curvature. Dynamic phenomena encountered in the method, such as eigenvalue curve veering, are discussed and methods are presented to accommodate these phenomena. We believe that this study will facilitate the development of future curvature-based microscale sensors for atomic force microscopy applications.  more » « less
Award ID(s):
1660448 1847513
NSF-PAR ID:
10216937
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Journal of Vibration and Acoustics
Volume:
143
Issue:
4
ISSN:
1048-9002
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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