A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers (Journal Article) | NSF PAGES

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Citation Details

A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers

Authors:: Zhou, Haocheng; Sheplak, Mark

Award ID(s):: 1439644 1939009

Publication Date:: 2020-10-01

NSF-PAR ID:: 10222129

Journal Name:: Journal of Microelectromechanical Systems

Volume:: 29

Issue:: 5

Page Range or eLocation-ID:: 960 to 965

ISSN:: 1057-7157

Sponsoring Org:: National Science Foundation

Free Publicly Accessible Full Text
Accepted Manuscript1.0
Publisher's Version of Record
https://doi.org/10.1109/JMEMS.2020.3009927