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1. In situ etching of β -Ga2O3 using tert -butyl chloride in an MOCVD system

   https://doi.org/10.1063/5.0239152  

   Gorsak, Cameron_A; Bowman, Henry_J; Gann, Katie_R; Buontempo, Joshua_T; Smith, Kathleen_T; Tripathi, Pushpanshu; Steele, Jacob; Jena, Debdeep; Schlom, Darrell_G; Xing, Huili_Grace; et al (December 2024, Applied Physics Letters)

   In this study, we investigate in situ etching of β-Ga2O3 in a metalorganic chemical vapor deposition system using tert-butyl chloride (TBCl). We report etching of both heteroepitaxial 2¯01-oriented and homoepitaxial (010)-oriented β-Ga2O3 films over a wide range of substrate temperatures, TBCl molar flows, and reactor pressures. We infer that the likely etchant is HCl (g), formed by the pyrolysis of TBCl in the hydrodynamic boundary layer above the substrate. The temperature dependence of the etch rate reveals two distinct regimes characterized by markedly different apparent activation energies. The extracted apparent activation energies suggest that at temperatures below ∼800 °C, the etch rate is likely limited by desorption of etch products. The relative etch rates of heteroepitaxial 2¯01 and homoepitaxial (010) β-Ga2O3 were observed to scale by the ratio of the surface energies, indicating an anisotropic etch. Relatively smooth post-etch surface morphology was achieved by tuning the etching parameters for (010) homoepitaxial films. 

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2. Matchings in k ‐partite k ‐uniform hypergraphs

   https://doi.org/10.1002/jgt.22527  

   Han, Jie; Zang, Chuanyun; Zhao, Yi (November 2019, Journal of Graph Theory)

   Abstract For and , let be a ‐partite ‐graph with parts each of size , where is sufficiently large. Assume that for each , every ‐set in lies in at least edges, and . We show that if , then contains a matching of size . In particular, contains a matching of size if each crossing ‐set lies in at least edges, or each crossing ‐set lies in at least edges and . This special case answers a question of Rödl and Ruciński and was independently obtained by Lu, Wang, and Yu. The proof of Lu, Wang, and Yu closely follows the approach of Han by using the absorbing method and considering an extremal case. In contrast, our result is more general and its proof is thus more involved: it uses a more complex absorbing method and deals with two extremal cases. 

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3. An IDEA: an i ngestion framework for d ata e nrichment in a sterixDB

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   Wang, Xikui; Carey, Michael J. (July 2019, Proceedings of the VLDB Endowment)
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   Zhang, Jin; Liu, Zhulin; Yin, Zheng; Yang, Xiufang; Ma, Yangmin; Szostak, Roman; Szostak, Michal (December 2020, Organic Letters)

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