Electrical Impedance Tomography (EIT) is a well-known imaging technique for detecting the electrical properties of an object in order to detect anomalies, such as conductive or resistive targets. More specifically, EIT has many applications in medical imaging for the detection and location of bodily tumors since it is an affordable and non-invasive method, which aims to recover the internal conductivity of a body using voltage measurements resulting from applying low frequency current at electrodes placed at its surface. Mathematically, the reconstruction of the internal conductivity is a severely ill-posed inverse problem and yields a poor quality image reconstruction. To remedy this difficulty, at least in part, we regularize and solve the nonlinear minimization problem by the aid of a Krylov subspace-type method for the linear sub problem during each iteration. In EIT, a tumor or general anomaly can be modeled as a piecewise constant perturbation of a smooth background, hence, we solve the regularized problem on a subspace of relatively small dimension by the Flexible Golub-Kahan process that provides solutions that have sparse representation. For comparison, we use a well-known modified Gauss–Newton algorithm as a benchmark. Using simulations, we demonstrate the effectiveness of the proposed method. The obtained reconstructions indicate that the Krylov subspace method is better adapted to solve the ill-posed EIT problem and results in higher resolution images and faster convergence compared to reconstructions using the modified Gauss–Newton algorithm.
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Fault Classification of Nonlinear Small Sample Data through Feature Sub-Space Neighbor Vote
The fault classification of a small sample of high dimension is challenging, especially for a nonlinear and non-Gaussian manufacturing process. In this paper, a similarity-based feature selection and sub-space neighbor vote method is proposed to solve this problem. To capture the dynamics, nonlinearity, and non-Gaussianity in the irregular time series data, high order spectral features, and fractal dimension features are extracted, selected, and stacked in a regular matrix. To address the problem of a small sample, all labeled fault data are used for similarity decisions for a specific fault type. The distances between the new data and all fault types are calculated in their feature subspaces. The new data are classified to the nearest fault type by majority probability voting of the distances. Meanwhile, the selected features, from respective measured variables, indicate the cause of the fault. The proposed method is evaluated on a publicly available benchmark of a real semiconductor etching dataset. It is demonstrated that by using the high order spectral features and fractal dimensionality features, the proposed method can achieve more than 84% fault recognition accuracy. The resulting feature subspace can be used to match any new fault data to the fingerprint feature subspace of each fault type, and hence can pinpoint the root cause of a fault in a manufacturing process.
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- Award ID(s):
- 1916866
- NSF-PAR ID:
- 10265908
- Date Published:
- Journal Name:
- Electronics
- Volume:
- 9
- Issue:
- 11
- ISSN:
- 2079-9292
- Page Range / eLocation ID:
- 1952
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
-
Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.3390/electronics9111952
