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   Annihilation of vacancy clusters in monolayer molybdenum diselenide (MoSe₂) under electron beam irradiation is reported. In situ high‐resolution transmission electron microscopy observation reveals that the annihilation is achieved by diffusion of vacancies to the free edge near the vacancy clusters. Monte Carlo simulations confirm that it is energetically favorable for the vacancies to locate at the free edge. By computing the minimum energy path for the annihilation of one vacancy cluster as a case study, it is further shown that electron beam irradiation and pre‐stress in the suspended MoSe₂monolayer are necessary for the vacancies to overcome the energy barriers for diffusion. The findings suggest a new mechanism of vacancy healing in 2D materials and broaden the capability of electron beam for defect engineering of 2D materials, a promising way of tuning their properties for engineering applications.

    

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   Neutrons generated through charge-exchange⁹Be (p; nⁱ)⁹Be reactions, with energies ranging from 0–33 MeV and an average energy of ∼9.8 MeV were used to irradiate conventional Schottky Ga₂O₃rectifiers and NiO/Ga₂O₃p-n heterojunction rectifiers to fluences of 1.1–2.2 × 10¹⁴cm⁻². The breakdown voltage was improved after irradiation for the Schottky rectifiers but was highly degraded for their NiO/Ga₂O₃counterparts. This may be a result of extended defect zones within the NiO. After irradiation, the switching characteristics were degraded and irradiated samples of both types could not survive switching above 0.7 A or 400 V, whereas reference samples were robust to 1 A and 1 kV. The carrier removal rate in both types of devices was ∼45 cm⁻¹. The forward currents and on-state resistances were only slightly degraded by neutron irradiation.

    

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