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Title: Ultra-High-Q Nanomechanics Through Dissipation Dilution: Trends and Perspectives
Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal “soft-clamping,” strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.  more » « less
Award ID(s):
1945832
PAR ID:
10291510
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Page Range / eLocation ID:
201 to 205
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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