Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning
- Award ID(s):
- 1727918
- PAR ID:
- 10291968
- Date Published:
- Journal Name:
- Chemistry of Materials
- Volume:
- 31
- Issue:
- 21
- ISSN:
- 0897-4756
- Page Range / eLocation ID:
- 8937 to 8947
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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