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Title: Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning
Award ID(s):
1727918
PAR ID:
10291968
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Chemistry of Materials
Volume:
31
Issue:
21
ISSN:
0897-4756
Page Range / eLocation ID:
8937 to 8947
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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