Hydrogen in β-Ga2O3 passivates shallow impurities and deep-level defects and can have a strong effect on conductivity. More than a dozen O–D vibrational lines have been reported for β-Ga2O3 treated with the heavy isotope of hydrogen, deuterium. To explain the large number of O–D centers that have been observed, the involvement of additional nearby defects and impurities has been proposed. A few O–H centers have been associated with specific impurities that were introduced intentionally during crystal growth. However, definitive assignments of O–H and O–D vibrational lines associated with important adventitious impurities, such as Si and Fe, have been difficult. A set of well-characterized Si-doped β-Ga2O3 epitaxial layers with different layer thicknesses has been deuterated and investigated by vibrational spectroscopy to provide new evidence for the assignment of a line at 2577 cm−1 to an OD–Si complex. The vibrational properties of several of the reported OD-impurity complexes are consistent with the existence of a family of defects with a VGa1ic−D center at their core that is perturbed by a nearby impurity.
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Impurity-hydrogen complexes in β-Ga2O3: Hydrogenation of shallow donors vs deep acceptors
Substitutional impurities in Ga2O3 are used to make the material n-type or semi-insulating. Several O-D vibrational lines for OD-impurity complexes that involve impurities that are shallow donors and deep acceptors have been reported recently. The present paper compares and contrasts the vibrational properties of complexes that involve shallow donors (OD-Si and OD-Ge) with complexes that involve deep acceptors (OD-Fe and OD-Mg). Complementary theory investigates the microscopic structures of defects that can explain the observed vibrational properties.
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- Award ID(s):
- 1901563
- PAR ID:
- 10328663
- Date Published:
- Journal Name:
- Journal of applied physics
- Volume:
- 131
- ISSN:
- 0021-8979
- Page Range / eLocation ID:
- 035706
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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