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Title: Schottky contacts to N-polar GaN with SiN interlayer for elevated temperature operation
In this Letter, we unveil the high-temperature limits of N-polar GaN Schottky contacts enhanced by a low-pressure chemical vapor deposited (LPCVD) SiN interlayer. Compared to conventional Schottky diodes, the insertion of a 5 nm SiN lossy dielectric interlayer in-between Ni and N-polar GaN increases the turn-on voltage ( V ON ) from 0.4 to 0.9 V and the barrier height ( ϕ B ) from 0.4 to 0.8 eV. This modification also reduces the leakage current at zero bias significantly: at room temperature, the leakage current in the conventional Schottky diode is >10 3 larger than that observed in the device with the SiN interlayer, while at 200 °C, this ratio increases to 10 5 . Thus, the rectification ratio (I ON /I OFF ) at ±1.5 V reduces to less than one at 250 °C for the conventional Schottky diode, whereas for SiN-coated diodes, rectification continues until 500 °C. The I–V characteristics of the diode with an SiN interlayer can be recovered after exposure to 400 °C or lower. Contact degradation occurs at 500 °C, although devices are not destroyed yet. Here, we report N-polar GaN Schottky contact operation up to 500 °C using an LPCVD SiN interlayer.  more » « less
Award ID(s):
1916800 1653383
PAR ID:
10359169
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
120
Issue:
17
ISSN:
0003-6951
Page Range / eLocation ID:
172109
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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