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Ferroelectricity enables key modern technologies from non-volatile memory to precision ultrasound. The first known wurtzite ferroelectric Al 1− x Sc x N has recently attracted attention because of its robust ferroelectricity and Si process compatibility, but the chemical and structural origins of ferroelectricity in wurtzite materials are not yet fully understood. Here we show that ferroelectric behavior in wurtzite nitrides has local chemical rather than extended structural origin. According to our coupled experimental and computational results, the local bond ionicity and ionic displacement, rather than simply the change in the lattice parameter of the wurtzite structure, is key to controlling the macroscopic ferroelectric response in these materials. Across gradients in composition and thickness of 0 < x < 0.35 and 140–260 nm, respectively, in combinatorial thin films of Al 1− x Sc x N, the pure wurtzite phase exhibits a similar c / a ratio regardless of the Sc content due to elastic interaction with neighboring crystals. The coercive field and spontaneous polarization significantly decrease with increasing Sc content despite this invariant c / a ratio. This property change is due to the more ionic bonding nature of Sc–N relative to the more covalent Al–N bonds, and the local displacement of the neighboring Al atoms caused by Sc substitution, according to DFT calculations. Based on these insights, ionicity engineering is introduced as an approach to reduce coercive field of Al 1− x Sc x N for memory and other applications and to control ferroelectric properties in other wurtzites.
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Nanoscale compositional segregation in epitaxial AlScN on Si (111)
We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity and induces ferroelectricity, and epitaxial thin films facilitate systematic structure-based investigations of this important and emerging class of materials. Two main effects are observed as a function of increasing Sc concentration. First, increasing crystalline disorder is observed together with a structural transition from wurtzite to rocksalt at ∼30 at% Sc. Second, nanoscale compositional segregation consistent with spinodal decomposition occurs at intermediate compositions, before the wurtzite to rocksalt phase boundary is reached. Lamellar features arising from composition fluctuations are correlated with polarization domains in AlScN, suggesting that composition segregation can influence ferroelectric properties. The present results provide a route to the creation of single crystal AlScN films on Si (111), as well as a means for self-assembled composition modulation.
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- Award ID(s):
- 1946231
- PAR ID:
- 10402755
- Date Published:
- Journal Name:
- Nanoscale Horizons
- ISSN:
- 2055-6756
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1039/d2nh00567k
