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Title: Growth of Highly Transparent Amorphous Carbon Films Using Beam Plasma Source
A single beam plasma source was used to deposit hydrogenated amorphous carbon (a-C:H) coatings at room temperature. Using methane source gas, a-C:H coatings were deposited at different radio frequency (RF) power to fabricate transparent and durable coatings. The film deposition rate was almost linearly proportional to the ion source power. Hydrogenated amorphous carbon films of ~100 nm thickness appeared to be highly transparent from UV to the infrared range with a transmittance of ~90% and optical bandgap of ~3.7 eV. The coatings also possess desirable mechanical properties with Young’s modulus of ~78 GPa and density of ~1.9 g/cm3. The combined material properties of high transmittance and high durability make the ion-source-deposited a-C:H coatings attractive for many applications.  more » « less
Award ID(s):
1917577
PAR ID:
10408456
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Coatings
Volume:
12
Issue:
8
ISSN:
2079-6412
Page Range / eLocation ID:
1159
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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