Advanced applications for human-robot interaction require perception of physical touch in a manner that imitates the human tactile perception. Feedback generated from tactile sensor arrays can be used to control the interaction of a robot with their environment and other humans. In this paper, we present our efforts to fabricate piezoresistive organic polymer sensor arrays using PEDOT: PSS or poly (3,4-ethylenedioxythiophene)-poly(styrenesulfonate). Sensors are realized as strain-gauges on Kapton substrates with thermal and electrical response characteristics to human touch. In this paper, we detail fabrication processes associated with a Gold etching technique combined with a wet lift-off photolithographic process to implement a circular tree designed sensor microstructure in our cleanroom. The testing of this microstructure is done on a load testing apparatus facilitated by an integrated circuit design. Furthermore, a lamination process is employed to compensate for temperature drift while measuring pressure for double-sided sensor substrates. Experiments carried out to evaluate the performance of the fabricated structure, indicates 100% sensor yields with the updated technique implemented.
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Inkjet Printing of PEDOT:PSS Inks for Robotic Skin Sensors
Enhancing physical human-robot interaction requires the improvement in the tactile perception of physical touch. Robot skin sensors exhibiting piezoresistive behavior can be used in conjunction with collaborative robots. In past work, fabrication of these tactile arrays was done using cleanroom techniques such as spin coating, photolithography, sputtering, wet and dry etching onto flexible polymers. In this paper, we present an addictive, non-cleanroom improved process of depositing PEDOT: PSS, which is the organic polymer responsible for the piezoresistive phenomenon of the robot skin sensor arrays. This publication details the patterning of the robot skin sensor structures and the adaptation of the inkjet printing technology to the fabrication process. This increases the possibility of scaling the production output while reducing the cleanroom fabrication cost and time from an approximately five-hour PEDOT: PSS deposition process to five minutes. Furthermore, the testing of these skin sensor arrays is carried out on a testing station equipped with a force plunger and an integrated circuit designed to provide perception feedback on various force load profiles controlled in an automated process. The results show uniform deposition of the PEDOT: PSS, consistent resistance measurement, and appropriate tactile response across an array of 16 sensors.
more » « less- Award ID(s):
- 1849213
- NSF-PAR ID:
- 10410850
- Date Published:
- Journal Name:
- ASME 2022 17th International Manufacturing Science and Engineering Conference
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Pressure sensitive robotic skins have long been investigated for applications to physical human-robot interaction (pHRI). Numerous challenges related to fabrication, sensitivity, density, and reliability remain to be addressed under various environmental and use conditions. In our previous studies, we designed novel strain gauge sensor structures for robotic skin arrays. We coated these star-shaped designs with an organic polymer piezoresistive material, Poly (3, 4-ethylenedioxythiophene)-ploy(styrenesulfonate) or PEDOT: PSS and integrated sensor arrays into elastomer robotic skins. In this paper, we describe a dry etching photolithographic method to create a stable uniform sensor layer of PEDOT:PSS onto star-shaped sensors and a lamination process for creating double-sided robotic skins that can be used with temperature compensation. An integrated circuit and load testing apparatus was designed for testing the resulting robotic skin pressure performance. Experiments were conducted to measure the loading performance of the resulting sensor prototypes and results indicate that over 80% sensor yields are possible with this fabrication process.more » « less
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Abstract Direct write Inkjet Printing is a versatile additive manufacturing technology that allows for the fabrication of multiscale structures with dimensions spanning from nano to cm scale. This is made possible due to the development of novel dispensing tools, enabling controlled and precise deposition of fluid with a wide range of viscosities (1 – 50 000 mPas) in nanoliter volumes. As a result, Inkjet printing has been recognized as a potential low-cost alternative for several established manufacturing methods, including cleanroom fabrication. In this paper, we present a characterization study of PEDOT: PSS polymer ink deposition printing process realized with the help of an automated, custom Direct Write Inkjet system. PEDOT: PSS is a highly conductive ink that possesses good film forming capabilities. Applications thus include printing thin films on flexible substrates for tactile (touch) sensors. We applied the Taguchi Design of Experiment (DOE) method to produce the optimal set of PEDOT:PSS ink dispensing parameters, to study their influence on the resulting ink droplet diameter. We experimentally determined that the desired outcome of a printed thin film with minimum thickness is directly related to 1) the minimum volume of dispensed fluid and 2) the presence of a preprocessing step, namely air plasma treatment of the Kapton substrate. Results show that an ink deposit with a minimum diameter of 482 μm, and a thin film with approximately 300 nm thickness were produced with good repeatability.
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Direct write Inkjet Printing is a versatile additive manufacturing technology that allows for the fabrication of multiscale structures with dimensions spanning from nano to cm scale. This is made possible due to the development of novel dispensing tools, enabling controlled and precise deposition of fluid with a wide range of viscosities (1 – 50 000 mPas) in nano-liter volumes. As a result, Inkjet printing has been recognized as a potential low-cost alternative for several established manufacturing methods, including cleanroom fabrication. In this paper, we present a characterization study of PEDOT: PSS polymer ink deposition printing process realized with the help of an automated, custom Direct Write Inkjet system. PEDOT: PSS is a highly conductive ink that possesses good film forming capabilities. Applications thus include printing thin films on flexible substrates for tactile (touch) sensors. We applied the Taguchi Design of Experiment (DOE) method to produce the optimal set of PEDOT:PSS ink dispensing parameters, to study their influence on the resulting ink droplet diameter. We experimentally determined that the desired outcome of a printed thin film with minimum thickness is directly related to 1) the minimum volume of dispensed fluid and 2) the presence of a preprocessing step, namely air plasma treatment of the Kapton substrate. Results show that an ink deposit with a minimum diameter of 482 μm, and a thin film with approximately 300 nm thickness were produced with good repeatability.more » « less
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Abstract Flexible piezoresistive films, such as, carbon black/polydimethylsiloxane (C‐PDMS) composites, are often used as skin analogs and integrated into complex array sensors for tactile sensing. The uniformity of the sensor characteristics heavily depends on the homogeneity of the composite. Therefore, the ability to locally characterize a film that will be integrated into a complex force sensor could be critical. Here, a method to characterize the local sensitivity of flexible piezoresistive films is presented. Using a conductive sphere, which was chosen over a flat probe to eliminate misalignment issues, the surface of a thin film composite is indented to characterize the change in resistivity in terms of average strain. Experiments were performed with 15 and 18 wt% carbon black C‐PDMS films of varying thickness. The contact radius of the probe with the piezoresistive film was estimated using the Johnson‐Roberts‐Kendall contact theory. Theoretical contact area estimates were found to agree with contact radius measurements carried out using optically transparent PDMS films observed through an optical microscope. Results show that C‐PDMS with 15 wt% carbon black exhibit a higher rate if change of resistivity and gauge factor than films of same thickness with 18 wt% carbon black. On the other hand, thicker films exhibit higher gauge factors for the two tested carbon black contents. Tests carried out at multiple locations yielded consistent sensitivity values, making these types of composites suitable for array type force sensors.
- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1115/msec2022-80989
