- Award ID(s):
- 2001036
- NSF-PAR ID:
- 10417804
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 40
- Issue:
- 5
- ISSN:
- 2166-2746
- Page Range / eLocation ID:
- 052804
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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