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Title: Molecular beam epitaxy of KTaO 3
Strain-engineering is a powerful means to tune the polar, structural, and electronic instabilities of incipient ferroelectrics. KTaO 3 is near a polar instability and shows anisotropic superconductivity in electron-doped samples. Here, we demonstrate growth of high-quality KTaO 3 thin films by molecular-beam epitaxy. Tantalum was provided by either a suboxide source emanating a TaO 2 flux from Ta 2 O 5 contained in a conventional effusion cell or an electron-beam-heated tantalum source. Excess potassium and a combination of ozone and oxygen (10% O 3 + 90% O 2 ) were simultaneously supplied with the TaO 2 (or tantalum) molecular beams to grow the KTaO 3 films. Laue fringes suggest that the films are smooth with an abrupt film/substrate interface. Cross-sectional scanning transmission electron microscopy does not show any extended defects and confirms that the films have an atomically abrupt interface with the substrate. Atomic force microscopy reveals atomic steps at the surface of the grown films. Reciprocal space mapping demonstrates that the films, when sufficiently thin, are coherently strained to the SrTiO 3 (001) and GdScO 3 (110) substrates.  more » « less
Award ID(s):
2039380
PAR ID:
10420520
Author(s) / Creator(s):
; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
41
Issue:
2
ISSN:
0734-2101
Page Range / eLocation ID:
022703
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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