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Abstract Strain engineering in perovskite oxides provides for dramatic control over material structure, phase, and properties, but is restricted by the discrete strain states produced by available high‐quality substrates. Here, using the ferroelectric BaTiO3, production of precisely strain‐engineered, substrate‐released nanoscale membranes is demonstrated via an epitaxial lift‐off process that allows the high crystalline quality of films grown on substrates to be replicated. In turn, fine structural tuning is achieved using interlayer stress in symmetric trilayer oxide‐metal/ferroelectric/oxide‐metal structures fabricated from the released membranes. In devices integrated on silicon, the interlayer stress provides deterministic control of ordering temperature (from 75 to 425 °C) and releasing the substrate clamping is shown to dramatically impact ferroelectric switching and domain dynamics (including reducing coercive fields to <10 kV cm−1and improving switching times to <5 ns for a 20 µm diameter capacitor in a 100‐nm‐thick film). In devices integrated on flexible polymers, enhanced room‐temperature dielectric permittivity with large mechanical tunability (a 90% change upon ±0.1% strain application) is demonstrated. This approach paves the way toward the fabrication of ultrafast CMOS‐compatible ferroelectric memories and ultrasensitive flexible nanosensor devices, and it may also be leveraged for the stabilization of novel phases and functionalities not achievable via direct epitaxial growth.
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Mechanically tunable elastic modulus of freestanding Ba1− x Sr x TiO3 membranes via phase-field simulation
The freestanding ferroelectric membranes with super-elasticity show promising applications in flexible electronic devices such as transducers, memories, etc. While there have been recent studies on the effect of mechanical bending on the domain structure evolutions and phase transitions in ferroelectric membranes, its influence on Young's modulus of these freestanding membranes is less explored, which is crucial for the design and application of flexible electronics. Here, a phase-field model is developed to simulate the tunability of Young's modulus of freestanding Ba1−xSrxTiO3 membranes under mechanical bending. It is demonstrated that the bended membrane shows a uniform Young's modulus compared with unbended membrane. By increasing the bending angle, Young's modulus tunability is enhanced, which can be attributed to the vortex-like domain structures induced by the mechanical bending. These vortex-like domains with large domain wall energy inhibit the subsequent domain switching under externally applied tensile strain and reduce the eigenstrain variation, which leads to a large Young's modulus. In addition, the formation of vortex domain structure is suppressed with increasing Sr2+ content in Ba1−xSrxTiO3 membranes at the same bending degree, resulting in a decrease in Young's modulus tunability. Our work reveals that the tunability of Young's modulus of freestanding ferroelectric membranes can be achieved by mechanical bending, which provides guidance for designing flexible electronic devices.
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- Award ID(s):
- 2132105
- PAR ID:
- 10441038
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 121
- Issue:
- 15
- ISSN:
- 0003-6951
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1063/5.0099772
