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Title: Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation

We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.

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Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
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National Science Foundation
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