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Title: Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.  more » « less
Award ID(s):
2015025
PAR ID:
10442336
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
Page Range / eLocation ID:
FTu3C.2
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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