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Abstract Optical polymer‐based integrated photonic devices are gaining interest for applications in optical packaging, biosensing, and augmented/virtual reality (AR/VR). The low refractive index of conventional organic polymers has been a barrier to realizing dense, low footprint photonic devices. The fabrication and characterization of integrated photonic devices using a new class of high refractive index polymers, chalcogenide hybrid inorganic/organic polymers (CHIPs), which possess high refractive indices and lower optical losses compared to traditional hydrocarbon‐based polymers, are reported. These optical polymers are derived from elemental sulfur via the inverse vulcanization process, which allows for inexpensive monomers to be used for these materials. A facile fabrication strategy using CHIPs via lithography is described for single‐mode optical waveguides, Y junction splitters, multimode interferometers (MMIs), and high Q factor ring resonators, along with device characterization. Furthermore, propagation losses of 0.4 dB cm−1near 1550 nm wavelength, which is the lowest measured loss in non‐fluorinated optical polymer waveguides, coupled with the benefits of low cost materials and manufacturing are reported. Ring resonators with Q factor on the order of 6 × 104and cavity finesse of 45, which are some of the highest values reported for optical polymer‐based ring resonators, are also reported.
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Large Bidirectional Refractive Index Change in Silicon‐rich Nitride via Visible Light Trimming
Abstract Phase‐sensitive integrated photonic devices are highly susceptible to minor manufacturing deviations, resulting in significant performance inconsistencies. This variability has limited the scalability and widespread adoption of these devices. Here, a major advancement is achieved through continuous‐wave (CW) visible light (405 and 520 nm) trimming of plasma‐enhanced chemical vapor deposition (PECVD) silicon‐rich nitride (SRN) waveguides. The demonstrated method achieves precise, bidirectional refractive index tuning with a single laser source in CMOS‐compatible SRN samples with refractive indices of 2.4 and 2.9 (measured at 1550 nm). By utilizing a cost‐effective setup for real‐time resonance tracking in micro‐ring resonators, the resonant wavelength shifts as fine as 10 pm are attained. Additionally, a record red shift of 49.1 nm and a substantial blue shift of 10.6 nm are demonstrated, corresponding to refractive index changes of approximately 0.11 and −2 × 10−2. The blue and red shifts are both conclusively attributed to thermal annealing. These results highlight SRN's exceptional capability for permanent optical tuning, establishing a foundation for stable, precisely controlled performance in phase‐sensitive integrated photonic devices.
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- PAR ID:
- 10576404
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Optical Materials
- Volume:
- 13
- Issue:
- 14
- ISSN:
- 2195-1071
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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