For this experimental study on evaporation of water from graphene, two graphene samples with different thickness and microstructure were used. Figure 1 shows the representative optical and scanning electron microscope (SEM) images of the two samples. Sample 1, shown in Figure 1a-b, is a 3 to 4 atomic layer of continuous graphene sheet grown on copper substrate via chemical vapor deposition (CVD) and was subsequently transferred to a quartz substrate using a wet chemical method reported previously [5]. The graphene thickness is at 1.2 nm to 1.4 nm, as measured by Atomic Force Microscopy. Sample 2, shown in Figure 1c-d, represents an inkjet-printed reduced graphene oxide on silicon and subsequently treated with a direct pulsed laser writing (DPLW) process for surface 3D-nanostructuring. The layer thickness is between 6 µm and 7 µm.
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Pulsed laser induced atomic layer etching of silicon
We demonstrate the laser mediated atomic layer etching (ALEt) of silicon. Using a nanosecond pulsed 266 nm laser focused loosely over and in a parallel configuration to the surface of the silicon, we dissociate Cl2 gas to induce chlorination. Then, we use pulsed picosecond irradiation to remove the chlorinated layer. Subsequently, we perform continuous wave (CW) laser annealing to eliminate amorphization caused by the picosecond laser etching. Based on atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), we observed strong evidence of chlorination and digital etching at 0.85 nm etching per cycle with good uniformity.
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- Award ID(s):
- 2024391
- PAR ID:
- 10453049
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 41
- Issue:
- 2
- ISSN:
- 0734-2101
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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