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Programmable photonic integrated circuits are expected to play an increasingly important role in enabling high-bandwidth optical interconnects and large-scale in-memory computing as needed to support the rise of artificial intelligence and machine learning technology. To that end, chalcogenide-based non-volatile phase-change materials (PCMs) present a promising solution due to zero static power. However, high switching voltage and a small number of operating levels present serious roadblocks to the widespread adoption of PCM-programmable units. Here, we demonstrate an electrically programmable wide bandgap Sb2S3-clad silicon ring resonator using a silicon microheater at a complementary-metal–oxide–semiconductor compatible voltage of <3 V. Our device shows a low switching energy of 35.33 nJ (0.48 mJ) for amorphization (crystallization) and reversible phase transitions with high endurance (>2000 switching events) near 1550 nm. Combining a volatile thermo-optic effect with non-volatile PCMs, we demonstrate 7-bit (127 levels) operation with excellent repeatability and reduced power consumption. Our demonstration of low-voltage and low-energy operation, combined with the hybrid volatile–nonvolatile approach, marks a significant step toward integrating PCM-based programmable units in large-scale optical interconnects.
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Nonvolatile Electrically Reconfigurable Integrated Photonic Switch Enabled by a Silicon PIN Diode Heater
Abstract Reconfigurability of photonic integrated circuits (PICs) has become increasingly important due to the growing demands for electronic–photonic systems on a chip driven by emerging applications, including neuromorphic computing, quantum information, and microwave photonics. Success in these fields usually requires highly scalable photonic switching units as essential building blocks. Current photonic switches, however, mainly rely on materials with weak, volatile thermo‐optic or electro‐optic modulation effects, resulting in large footprints and high energy consumption. As a promising alternative, chalcogenide phase‐change materials (PCMs) exhibit strong optical modulation in a static, self‐holding fashion, but the scalability of present PCM‐integrated photonic applications is still limited by the poor optical or electrical actuation approaches. Here, with phase transitions actuated by in situ silicon PIN diode heaters, scalable nonvolatile electrically reconfigurable photonic switches using PCM‐clad silicon waveguides and microring resonators are demonstrated. As a result, intrinsically compact and energy‐efficient switching units operated with low driving voltages, near‐zero additional loss, and reversible switching with high endurance are obtained in a complementary metal‐oxide‐semiconductor (CMOS)‐compatible process. This work can potentially enable very large‐scale CMOS‐integrated programmable electronic–photonic systems such as optical neural networks and general‐purpose integrated photonic processors.
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- Award ID(s):
- 1640986
- PAR ID:
- 10455380
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials
- Volume:
- 32
- Issue:
- 31
- ISSN:
- 0935-9648
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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