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Title: Demonstration of Wide Bandgap AlGaN/GaN Negative‐Capacitance High‐Electron‐Mobility Transistors (NC‐HEMTs) Using Barium Titanate Ferroelectric Gates
Abstract

A negative‐capacitance high electron mobility transistor (NC‐HEMT) with low hysteresis in the subthreshold region is demonstrated in the wide bandgap AlGaN/GaN material system using sputtered BaTiO3as a “weak” ferroelectric gate in conjunction with a conventional SiNxdielectric. An enhancement in the capacitance for BaTiO3/SiNxgate stacks is observed in comparison to control structures with SiNxgate dielectrics directly indicating the negative capacitance contribution of the ferroelectric BaTiO3layer. A significant reduction in the minimum subthreshold slope for the NC‐HEMTs is obtained in contrast to standard metal‐insulator‐semiconductor HEMTs with SiNxgate dielectrics—97.1 mV dec−1versus 145.6 mV dec−1—with almost no hysteresis in theIDVGtransfer curves. These results are promising for the integration of ferroelectric perovskite oxides with III‐Nitride devices toward NC‐field‐effect transistor switches with reduced power consumption.

 
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Award ID(s):
1740119
NSF-PAR ID:
10456787
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  
Publisher / Repository:
Wiley Blackwell (John Wiley & Sons)
Date Published:
Journal Name:
Advanced Electronic Materials
Volume:
6
Issue:
8
ISSN:
2199-160X
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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