The residue of common photo‐ and electron‐beam resists, such as poly(methyl methacrylate) (PMMA), is often present on the surface of 2D crystals after device fabrication. The residue degrades device properties by decreasing carrier mobility and creating unwanted doping. Here, MoS2and WSe2field effect transistors (FETs) with residue are cleaned by contact mode atomic force microscopy (AFM) and the impact of the residue on: 1) the intrinsic electrical properties, and 2) the effectiveness of electric double layer (EDL) gating are measured. After cleaning, AFM measurements confirm that the surface roughness decreases to its intrinsic state (i.e., ≈0.23 nm for exfoliated MoS2and WSe2) and Raman spectroscopy shows that the characteristic peak intensities (E2gand A1g) increase. PMMA residue causes p‐type doping corresponding to a charge density of ≈7 × 1011cm−2on back‐gated MoS2and WSe2FETs. For FETs gated with polyethylene oxide (PEO)76:CsClO4, removing the residue increases the charge density by 4.5 × 1012cm−2, and the maximum drain current by 247% (statistically significant,
In this paper, electrostatically configurable 2D tungsten diselenide (WSe2) electronic devices are demonstrated. Utilizing a novel triple‐gate design, a WSe2device is able to operate as a tunneling field‐effect transistor (TFET), a metal–oxide–semiconductor field‐effect transistor (MOSFET) as well as a diode, by electrostatically tuning the channel doping to the desired profile. The implementation of scaled gate dielectric and gate electrode spacing enables higher band‐to‐band tunneling transmission with the best observed subthreshold swing (SS) among all reported homojunction TFETs on 2D materials. Self‐consistent full‐band atomistic quantum transport simulations quantitatively agree with electrical measurements of both the MOSFET and TFET and suggest that scaling gate oxide below 3 nm is necessary to achieve sub‐60 mV dec−1SS, while further improvement can be obtained by optimizing the spacers. Diode operation is also demonstrated with the best ideality factor of 1.5, owing to the enhanced electrostatic control compared to previous reports. This research sheds light on the potential of utilizing electrostatic doping scheme for low‐power electronics and opens a path toward novel designs of field programmable mixed analog/digital circuitry for reconfigurable computing.
more » « less- NSF-PAR ID:
- 10459254
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Small
- Volume:
- 15
- Issue:
- 41
- ISSN:
- 1613-6810
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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