Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper, we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.
An approach to designing multiconfiguration afocal telescopes is developed and demonstrated. Freeform surfaces are used to maximize the achievable diffraction-limited zoom ratio while staying in a compact volume for a two-position multiconfiguration afocal optical system. The limitations of these systems with three-mirror beam paths are discussed and subsequently overcome by introducing an additional degree of freedom. In a four-mirror beam path system, the goal of a 5x zoom ratio is achieved with a compensated exit pupil and diffraction-limited performance. A significant benefit in optical performance when using freeform surfaces is shown compared to more conventional surface types.
more » « less- NSF-PAR ID:
- 10489719
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 32
- Issue:
- 4
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 6154
- Size(s):
- ["Article No. 6154"]
- Sponsoring Org:
- National Science Foundation
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