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1. Bandgap of Epitaxial Single-Crystal BiFe1−xMnxO3 Films Grown Directly on SrTiO3/Si(001)

   https://doi.org/10.3390/ma18092022  

   Cantrell, Samuel R; Miracle, John T; Cottier, Ryan J; Lindsey, Skyler; Theodoropoulou, Nikoleta (May 2025, Materials)

   We report the growth and optical characterization of single-crystal BiFe1−xMnxO3 thin films directly on SrTiO3/Si(001) substrates using molecular beam epitaxy. X-ray diffraction confirmed epitaxial growth, film crystallinity, and sharp interface quality. Scanning electron microscopy and energy dispersive X-ray spectroscopy verified uniform film morphology and successful Mn incorporation. Spectroscopic ellipsometry revealed a systematic bandgap reduction with increasing Mn concentration, from 2.7 eV in BiFeO3 to 2.58 eV in BiFe0.74Mn0.26O3, consistent with previous reports on Mn-doped BiFeO3. These findings highlight the potential of BiFe1₋xMnxO3 films for bandgap engineering, advancing their integration into silicon-compatible multifunctional optoelectronic and photovoltaic applications. 

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2. Epitaxial growth of α-(Al x Ga1− x )2O3 by suboxide molecular-beam epitaxy at 1 µm/h

   https://doi.org/10.1063/5.0170095  

   Steele, Jacob; Azizie, Kathy; Pieczulewski, Naomi; Kim, Yunjo; Mou, Shin; Asel, Thaddeus_J; Neal, Adam_T; Jena, Debdeep; Xing, Huili_G; Muller, David_A; et al (April 2024, APL Materials)

   We report the use of suboxide molecular-beam epitaxy (S-MBE) to grow α-(AlxGa1−x)2O3 films on (110) sapphire substrates over the 0 < x < 0.95 range of aluminum content. In S-MBE, 99.98% of the gallium-containing molecular beam arrives at the substrate in a preoxidized form as gallium suboxide (Ga2O). This bypasses the rate-limiting step of conventional MBE for the growth of gallium oxide (Ga2O3) from a gallium molecular beam and allows us to grow fully epitaxial α-(AlxGa1−x)2O3 films at growth rates exceeding 1 µm/h and relatively low substrate temperature (Tsub = 605 ± 15 °C). The ability to grow α-(AlxGa1−x)2O3 over the nominally full composition range is confirmed by Vegard’s law applied to the x-ray diffraction data and by optical bandgap measurements with ultraviolet–visible spectroscopy. We show that S-MBE allows straightforward composition control and bandgap selection for α-(AlxGa1−x)2O3 films as the aluminum incorporation x in the film is linear with the relative flux ratio of aluminum to Ga2O. The films are characterized by atomic-force microscopy, x-ray diffraction, and scanning transmission electron microscopy (STEM). These α-(AlxGa1−x)2O3 films grown by S-MBE at record growth rates exhibit a rocking curve full width at half maximum of ≊ 12 arc secs, rms roughness <1 nm, and are fully commensurate for x ≥ 0.5 for 20–50 nm thick films. STEM imaging of the x = 0.78 sample reveals high structural quality and uniform composition. Despite the high structural quality of the films, our attempts at doping with silicon result in highly insulating films. 

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3. Effect of post-deposition annealing on crystal structure of RF magnetron sputtered germanium dioxide thin films

   https://doi.org/10.1116/6.0003960  

   Abed, Ahmad Matar; Peterson, Rebecca L (October 2024, Journal of Vacuum Science & Technology A)

   In this work, we demonstrate the growth and phase stabilization of ultrawide bandgap polycrystalline rutile germanium dioxide (GeO2) thin films. GeO2 thin films were deposited using RF magnetron sputtering on r-plane sapphire (Al2O3) substrates. As-deposited films were x-ray amorphous. Postdeposition annealing was performed at temperatures between 650 and 950 °C in an oxygen or nitrogen ambient. Annealing at temperatures from 750 to 950 °C resulted in mixed-phase polycrystalline films containing tetragonal (rutile) GeO2, hexagonal (α-quartz) GeO2, and/or cubic (diamond) germanium (Ge). When nitrogen was used as the anneal ambient, mixed GeO2 phases were observed. In contrast, annealing in oxygen promoted stabilization of the r-GeO2 phase. Grazing angle x-ray diffraction showed a preferred orientation of (220) r-GeO2 for all crystallized films. The combination of O2 annealing and O2 flux during growth resulted in r-GeO2 films with highly preferential alignment. Using electron microscopy, we observed an interfacial layer of hexagonal-oriented GeO2 with epitaxial alignment to the (11¯02) Al2O3 substrate, which may help stabilize the top polycrystalline r-GeO2 film. 

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4. Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates

   https://doi.org/10.1116/6.0004575  

   Meng, Lingyu; Yu, Dong Su; Sarkar, Md_Mosarof Hossain; Zhao, Hongping (July 2025, Journal of Vacuum Science & Technology A)

   Background carbon incorporation and film cracking issue in (001) β-Ga2O3 films grown by metalorganic chemical vapor deposition (MOCVD) are investigated. Quantitative secondary ion mass spectrometry analysis shows that increasing the O2 flow rate significantly reduces carbon concentration, suggesting the importance of optimizing the VI/III ratio and growth temperature to achieve low compensation and controllable doping in MOCVD of (001) Ga2O3 films. MOCVD growth of (001) β-Ga2O3 films with a film thickness of 25 μm at a growth rate of 10 μm/h is achieved. However, film cracking remains a persistent challenge. Reducing the growth rate by adjusting the trimethylgallium (TMGa) flow rate or increasing chamber pressure effectively suppresses cracking, but it results in slower growth rates. In addition, lower growth temperature and high chamber pressure can help suppressing surface reconstruction and reduce the formation of cracking. Buffer layers grown at 850 °C, 100 Torr, and 58 μmol/min of TMGa significantly improve surface morphology of drift layers. Moreover, the use of AlGaO buffer layers with 8% of Al and a thickness of ∼130 nm leads to a lower crack density. X-ray rocking curve analysis confirms high crystalline quality at a growth rate of 10 μm/h, with no degradation observed from the introduction of an AlGaO buffer layer. These optimized growth conditions effectively improve surface smoothness and minimize defects. Results from this work provide fundamental insights in MOCVD epitaxy of β-Ga2O3 on (001) Ga2O3 substrates, revealing the opportunities and challenges of MOCVD (001) β-Ga2O3 thin films with fast growth rates for high-power electronic device technology. 

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5. A new semiconductor: Ti0.5Mg0.5N(001)

   https://doi.org/10.1109/NANOTECH.2018.8653564  

   Wang, Baiwei; Gall, Daniel (November 2018, 2018 IEEE Nanotechnology Symposium (ANTS), Albany, NY, 2018)

   Ti0.5Mg0.5N has recently been predicted to be a semiconductor with a 1.3 eV band gap and promising properties for thermoelectric and plasmonic devices. As a first step towards experimental validation, epitaxial Ti0.5Mg0.5N(001) layers are deposited on MgO(001) by reactive magnetron co-sputtering from titanium and magnesium targets at 600 °C in pure N2 atmospheres. X-ray diffraction ω-2θ scans, ω-rocking curves, φ-scans, and high resolution reciprocal space maps show that Ti0.5Mg0.5N alloys form a pseudobinary rocksalt structure and are single crystals with a cube-on-cube epitaxial relationship with the substrate: (001)TiMgN║(001)MgO and [100]TiMgN║[100]MgO. A 275-nm-thick Ti0.5Mg0.5N layer is fully relaxed and exhibits a 002 ω-rocking curve width ω = 0.73°, while a 36-nm-thick layer is fully strained and has a ω = 0.49°. These results indicate a thickness-dependent strain state which suggests a critical thickness for misfit dislocation nucleation and glide which is between 36 and 275 nm. A measured negative temperature coefficient of resistivity in combination with a low optical absorption coefficient of 0.25 × 105 cm 1 for λ = 740 nm, and a vanishing density of states at the Fermi level measured by x-ray photoelectron spectroscopy support the prediction that Ti0.5Mg0.5N is a semiconductor. 

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