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Title: Inverted Scanning Microwave Microscopy of GaN/AlN High-Electron Mobility Transistors
In this paper, an inverted scanning microwave microscope (iSMM) is used to characterize the channel of a gateless GaN/AlN high-electron-mobility transistor (HEMT). Unlike conventional SMM, iSMM allows for 2-port measurements. Unlike conventional iSMM, the present iSMM probe is connected to Port 1 of a vector network analyzer with the HEMT drain and source remain on Port 2. Under different DC biases VGS (applied through the iSMM probe) and VDS (kept constant at 1 V), changes in both reflection coefficient S11 and transmission coefficient S21 are monitored as the iSMM probe scans along the width of the channel, revealing significant nonuniformity. Additionally, changes in S11 and S21 are significant when VGS ≥ −4 V, but insignificant when VGS = −8 V, consistent with the measured threshold voltage at −6 V for a gated HEMT. These results confirm that iSMM can be used to locally modulate the channel conduction of a HEMT while monitoring its RF response, before the actual gate is added. In turn, the nonuniformity measured by the iSMM can be used to diagnose and improve HEMT materials and processes.  more » « less
Award ID(s):
2117305 2132323
PAR ID:
10542569
Author(s) / Creator(s):
; ; ; ; ; ; ;
Publisher / Repository:
IEEE
Date Published:
ISBN:
979-8-3503-6273-2
Page Range / eLocation ID:
1 to 4
Subject(s) / Keyword(s):
Scanning microwave microscope transfer characteristics two-dimensional electron gas GaN HEMT
Format(s):
Medium: X
Location:
Washington, DC, USA
Sponsoring Org:
National Science Foundation
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