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Title: Measured optical losses of Sc doped AlN waveguides
Although Sc doped AlN (ScAlN) has been used extensively in micro-electro-mechanical systems (MEMS) devices and more recently in optical devices, there have not been thorough studies of its intrinsic optical losses. Here we explore the optical losses of the Sc0.30Al0.70N waveguide system by observing racetrack resonator waveguide quality factors. Using a partial physical etch, we fabricate waveguides and extract propagation losses as low as 1.6 ± 0.3 dB/cm at wavelengths around 1550 nm, mostly dominated by intrinsic material absorption from the Sc0.30Al0.70N thin film layer. The highest quality factor of the resonators was greater than 87,000. The propagation loss value is lower than any value previously published and shows that this material can be broadly used in optical modulators without significant loss.  more » « less
Award ID(s):
1905834
PAR ID:
10552089
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
Optica publishing group
Date Published:
Journal Name:
Optics Express
Volume:
32
Issue:
4
ISSN:
1094-4087
Page Range / eLocation ID:
5252
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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