The refractory metal iridium has many applications in high performance optical devices due to its high reflectivity into X-ray frequencies, low oxidation rate, and high melting point. Depositing Ir via magnetron sputtering produces high quality thin films, but the chamber pressure and sputter conditions can change Ir film microstructure on the nanoscale. Film microstructure is commonly examined through microscopy of film cross-sections, which is both a destructive characterization method and time consuming. In this work, we have utilized a non-destructive characterization technique, spectroscopic ellipsometry, to correlate the optical properties of the metal films with their structural morphologies, enabling large-scale inspection of optical components or the ability to customize the metal refractive index for the application at hand. The optical properties of Ir thin films deposited at chamber pressures from 10 mTorr to 25 mTorr are reported and compared to microscopy and resistivity results. The measurements were conducted with films deposited both on a bare wafer and on a titanium sublayer.
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Nanoscale friction of high entropy alloy sulfide thin films in comparison with molybdenum disulfide
We present nanoscale friction measurements performed on sputter-deposited high entropy alloy (HEA) sulfide thin films [(VNbTaMoW)S2] via atomic force microscopy. The results reveal (i) the influence of deposition time on the film morphology and (ii) the presence of isolated areas of low friction on film surfaces. We compare the friction results on HEA sulfide thin films with those on a prototypical solid lubricant, sputter-deposited molybdenum disulfide (MoS2), and find that they are superior in terms of lubricative performance. Variable temperature x-ray diffraction, performed up to 973 K, reveals that HEA sulfide thin films exhibit improved oxidation resistance when compared with MoS2 films. Combined, our results show that HEA sulfide thin films have considerable potential as oxidation-resistant solid lubricant coatings.
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- PAR ID:
- 10556796
- Publisher / Repository:
- AIP
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 123
- Issue:
- 26
- ISSN:
- 0003-6951
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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