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Title: Twenty-nine million intrinsic Q -factor monolithic microresonators on thin-film lithium niobate
The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution ofQfactors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve aQfactor within 1 order of magnitude of the material limit.  more » « less
Award ID(s):
2137723
PAR ID:
10563695
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
Optica
Date Published:
Journal Name:
Photonics Research
Volume:
12
Issue:
8
ISSN:
2327-9125
Page Range / eLocation ID:
A63
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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