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  • Exploring Gas-Phase Chemical Reactions in NH 3 /B 2 H 6 Systems for Chemical Vapor Deposition Using Reactive Molecular Dynamics
Title: Exploring Gas-Phase Chemical Reactions in NH 3 /B 2 H 6 Systems for Chemical Vapor Deposition Using Reactive Molecular Dynamics
Award ID(s):
2039351 1539916
PAR ID:
10584850
Author(s) / Creator(s):
; ;
Publisher / Repository:
ACS Publications
Date Published:
Journal Name:
The Journal of Physical Chemistry A
Volume:
128
Issue:
13
ISSN:
1089-5639
Page Range / eLocation ID:
2584 to 2593
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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