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F-band substrate-integrated waveguides (SIWs) are designed, fabricated, and characterized on a SiC wafer, along with SIW-based filters, impedance standards, and transitions to grounded coplanar waveguides (GCPWs). The GCPW-SIW transitions not only facilitate wafer probing, but also double as resonators to form a 3-pole band-pass filter together with an SIW resonator. The resulted filter exhibits a 1.5-dB insertion loss at 115 GHz with a 34-dB return loss and a 19-GHz (16%) 3-dB bandwidth. The size of the filter is only 63% of previous filters comprising three SIW resonators. These results show the feasibility for monolithic integration of highquality filters with high-efficiency antennas and amplifiers in a single-chip RF frontend above 110 GHz, which is particularly advantageous for 6G wireless communications and nextgeneration automobile radars.
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This content will become publicly available on June 1, 2026
Frequency and Bandwidth Design Toward Millimeter-Wave Thin-Film Lithium Niobate Acoustic Filters
This letter presents a versatile design method for achieving precise frequency and bandwidth control of compact acoustic filters monolithically at millimeter wave (mmWave) in transferred thin-film lithium niobate (LiNbO3). Prototypes are implemented with lateral field excited first-order antisymmetric (A1) mode bulk acoustic resonators (XBARs). The design leverages the in-plane anisotropy of the e15 piezoelectric coefficient in 128° Y-cut LiNbO3, enabling monolithic control of electromechanical coupling ( k2 ) by simply rotating the resonator layout. This allows for filters with customizable fractional bandwidths (FBWs). Additionally, fine-tuning of the center frequency ( fc ) is achieved through selective trimming of the film for series and shunt resonators, enabling a single design to be scaled across frequencies with enhanced fabrication tolerance. To validate the approach, we designed and fabricated a filter centered at 18.6GHz, achieving a low insertion loss (IL) of 1.84 dB, and a precise designed FBW of 9.5%. This platform shows a significant promise for enabling a monolithic filter bank with precise band selection, paving the way for the next generation of mmWave acoustic filters.
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- Award ID(s):
- 2339731
- PAR ID:
- 10632399
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- IEEE Microwave and Wireless Technology Letters
- Volume:
- 35
- Issue:
- 6
- ISSN:
- 2771-957X
- Page Range / eLocation ID:
- 796 to 799
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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