Abstract In this study, Si/β‐Ga2O3solar‐blind photodetectors (PDs) have been demonstrated via micro‐transfer printing of a single crystalline Si pillar on β‐Ga2O3. Unlike other previous approaches for β‐Ga2O3based heterojunction, this new single crystalline p‐n Si/β‐Ga2O3heterojunction has a particle‐free heterointerface and does not show any sign of internal strain after the heterogeneous integration that is confirmed by Raman spectroscopy. As a result, PDs exhibit extremely high photoresponsivity (748 A W−1), quantum efficiency (3.67 × 105%), and UV/visible rejection ratio (≈105) under UV light illumination. This result is believed to provide a viable route for the realization of high‐performance solar‐blind photodetection systems, which form some of the most indispensable and important components in high‐performance next‐generation security, biomedical, and environmental monitoring systems. Also, the unique heterogeneous integration method allows us to realize a variety of β‐Ga2O3based heterostructures that can further enhance the optical performances of β‐Ga2O3based PDs.
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This content will become publicly available on July 1, 2026
Highly Textured Sn‐Doped Ga 2 O 3 Epilayers for Economically Viable Solar‐Blind Ultraviolet Photodetectors with High Responsivity
Abstract The design and development of solar‐blind photodetectors utilizing ultrawide bandgap semiconductors have garnered significant attention due to their extensive utility in specialty commercial sectors. Solar‐blind photodetectors that display excellent photosensitivity, fast response time and are produced using cost‐effective fabrication steps will fulfill the performance demands in relevant applications. Herein, highly textured Sn‐doped Ga2O3thin film metal‐semiconductor‐metal type deep‐UV photodetectors using a commercially scalable magnetron sputtering method are reported. Commercially achievable growth and fabrication steps are intentionally chosen to demonstrate an economically viable photodetection workflow without compromising the device's performance. In‐depth structural, morphological, chemical, and optical characterization are reported to optimize the configuration for further device fabrication and testing. Under transient triggering circumstances, a fast response time of ≈500 ms is reported, accompanied by a responsivity of ≈60.5 A W−1. The detectivity, external quantum efficiency, and photo‐to‐dark current ratio values are reported as 1.6 × 1013Jones, 2.8 × 104%, and 17.4, respectively. The overall device performance and cost‐effective fabrication process for solar‐blind UV photodetection using Sn‐doped Ga2O3is promising. The approach holds promise for significant implications toward the development of electronics capable of functioning in extreme environments and exhibits substantial potential for enhancing low‐cost UV photodetector technology.
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- Award ID(s):
- 1827745
- PAR ID:
- 10632516
- Publisher / Repository:
- WILEY
- Date Published:
- Journal Name:
- Advanced Optical Materials
- Volume:
- 13
- Issue:
- 20
- ISSN:
- 2195-1071
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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