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Abstract This paper provides comprehensive experimental analysis relating to improvements in the two-dimensional (2D) p-type metal–oxide–semiconductor (PMOS) field effect transistors (FETs) by pure van der Waals (vdW) contacts on few-layer tungsten diselenide (WSe2) with high-k metal gate (HKMG) stacks. Our analysis shows that standard metallization techniques (e.g., e-beam evaporation at moderate pressure ~ 10–5 torr) results in significant Fermi-level pinning, but Schottky barrier heights (SBH) remain small (< 100 meV) when using high work function metals (e.g., Pt or Pd). Temperature-dependent analysis uncovers a more dominant contribution to contact resistance from the channel access region and confirms significant improvement through less damaging metallization techniques (i.e., reduced scattering) combined with strongly scaled HKMG stacks (enhanced carrier density). A clean contact/channel interface is achieved through high-vacuum evaporation and temperature-controlled stepped deposition providing large improvements in contact resistance. Our study reports low contact resistance of 5.7 kΩ-µm, with on-state currents of ~ 97 µA/µm and subthreshold swing of ~ 140 mV/dec in FETs with channel lengths of 400 nm. Furthermore, theoretical analysis using a Landauer transport ballistic model for WSe2SB-FETs elucidates the prospects of nanoscale 2D PMOS FETs indicating high-performance (excellent on-state current vs subthreshold swing benchmarks) towards the ultimate CMOS scaling limit.more » « less
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Abstract Recent studies of resistive switching devices with hexagonal boron nitride (h-BN) as the switching layer have shown the potential of two-dimensional (2D) materials for memory and neuromorphic computing applications. The use of 2D materials allows scaling the resistive switching layer thickness to sub-nanometer dimensions enabling devices to operate with low switching voltages and high programming speeds, offering large improvements in efficiency and performance as well as ultra-dense integration. These characteristics are of interest for the implementation of neuromorphic computing and machine learning hardware based on memristor crossbars. However, existing demonstrations of h-BN memristors focus on single isolated device switching properties and lack attention to fundamental machine learning functions. This paper demonstrates the hardware implementation of dot product operations, a basic analog function ubiquitous in machine learning, using h-BN memristor arrays. Moreover, we demonstrate the hardware implementation of a linear regression algorithm on h-BN memristor arrays.more » « less
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Abstract This work reports on the hardware implementation of analog dot-product operation on arrays of 2D hexagonal boron nitride (h-BN) memristors. This extends beyond previous work that studied isolated device characteristics towards the application of analog neural network accelerators based on 2D memristor arrays. The wafer-level fabrication of the memristor arrays is enabled by large-area transfer of CVD-grown few-layer (8 layers) h-BN films. Individual devices achieve an on/off ratio of >10, low voltage operation (~0.5 Vset/Vreset), good endurance (>6,000 programming steps), and good retention (>104 s). The dot-product operation shows excellent linearity and repeatability, with low read energy consumption (~200 aJ to 20 fJ per operation), with minimal error and deviation over various measurement cycles. Moreover, we present the implementation of a stochastic logistic regression algorithm in 2D h-BN memristor hardware for the classification of noisy images. The promising resistive switching characteristics, performance of dot-product computation, and successful demonstration of logistic regression in h-BN memristors signify an important step towards the integration of 2D materials for next-generation neuromorphic computing systems.more » « less
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Abstract Chemical vapor deposition (CVD)-grown monolayer (ML) molybdenum disulfide (MoS 2 ) is a promising material for next-generation integrated electronic systems due to its capability of high-throughput synthesis and compatibility with wafer-scale fabrication. Several studies have described the importance of Schottky barriers in analyzing the transport properties and electrical characteristics of MoS 2 field-effect-transistors (FETs) with metal contacts. However, the analysis is typically limited to single devices constructed from exfoliated flakes and should be verified for large-area fabrication methods. In this paper, CVD-grown ML MoS 2 was utilized to fabricate large-area (1 cm × 1 cm) FET arrays. Two different types of metal contacts (i.e. Cr/Au and Ti/Au) were used to analyze the temperature-dependent electrical characteristics of ML MoS 2 FETs and their corresponding Schottky barrier characteristics. Statistical analysis provides new insight about the properties of metal contacts on CVD-grown MoS 2 compared to exfoliated samples. Reduced Schottky barrier heights (SBH) are obtained compared to exfoliated flakes, attributed to a defect-induced enhancement in metallization of CVD-grown samples. Moreover, the dependence of SBH on metal work function indicates a reduction in Fermi level pinning compared to exfoliated flakes, moving towards the Schottky–Mott limit. Optical characterization reveals higher defect concentrations in CVD-grown samples supporting a defect-induced metallization enhancement effect consistent with the electrical SBH experiments.more » « less
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This paper presents an extensive study of linear and logistic regression algorithms implemented with 1T1R memristor crossbars arrays. Using a sophisticated simulation platform that wraps circuit-level simulations of 1T1R crossbars and physics-based models of RRAM (memristors), we elucidate the impact of device variability on algorithm accuracy, convergence rate and precision. Moreover, a smart pulsing strategy is proposed for practical implementation of synaptic weight updates that can accelerate training in real crossbar architectures. Stochastic multi-variable linear regression shows robustness to memristor variability in terms of prediction accuracy but reveals impact on convergence rate and precision. Similarly, the stochastic logistic regression crossbar implementation reveals immunity to memristor variability as determined by negligible effects on image classification accuracy but indicates an impact on training performance manifested as reduced convergence rate and degraded precision.more » « less
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