This paper presents a mid-air haptic interface device enabled by a piezoelectric micromachined ultrasonic transducer (pMUT) array achieving an unprecedentedly high transmission pressure of 2900 Pa at a 15 mm distance for the first time. The structure is based on sputtered potassium sodium niobate (K,Na)NbO3 (KNN) thin film with a high piezoelectric coefficient (𝑒𝑒31 ~ 8-10 C/m2). A prototype KNN pMUT array composed of 15×15 dual-electrode circular-shape diaphragms exhibits a resonant frequency around 92.4 kHz. Testing results show a transmitting sensitivity of 120.8 Pa/cm2 per volt under only 12 Vp-p excitation at the natural focal point of 15 mm away, which is at least 3 times that of previously reported AlN pMUTs at a similar frequency. Furthermore, an instant non-contact haptic stimulation of wind-like sensation on human palms has been realized. As such, this work sheds light on a new class of pMUT array with high acoustic output pressure for human-machine interface applications, such as consumer electronics and AR/VR systems.
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Passive metamaterial-based acoustic holograms in ultrasound energy transfer systems
Contactless energy transfer (CET) is a technology that is particularly relevant in applications where wired electrical contact is dangerous or impractical. Furthermore, it would enhance the development, use, and reliability of low-power sensors in applications where changing batteries is not practical or may not be a viable option. One CET method that has recently attracted interest is the ultrasonic acoustic energy transfer, which is based on the reception of acoustic waves at ultrasonic frequencies by a piezoelectric receiver. Patterning and focusing the transmitted acoustic energy in space is one of the challenges for enhancing the power transmission and locally charging sensors or devices. We use a mathematically designed passive metamaterial-based acoustic hologram to selectively power an array of piezoelectric receivers using an unfocused transmitter. The acoustic hologram is employed to create a multifocal pressure pattern in the target plane where the receivers are located inside focal regions. We conduct multiphysics simulations in which a single transmitter is used to power multiple receivers with an arbitrary two-dimensional spatial pattern via wave controlling and manipulation, using the hologram. We show that the multi-focal pressure pattern created by the passive acoustic hologram will enhance the power transmission for most receivers.
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- Award ID(s):
- 1711139
- NSF-PAR ID:
- 10064617
- Date Published:
- Journal Name:
- Passive metamaterial-based acoustic holograms in ultrasound energy transfer systems
- Volume:
- 10595
- Page Range / eLocation ID:
- 43
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
-
Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1117/12.2296741
