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Title: Growth and characterization of Sc 2 O 3 doped Ta 2 O 5 thin films

We present the optical and structural characterization of films ofTa2O5,Sc2O3, andSc2O3dopedTa2O5with a cation ratio around 0.1 grown by reactive sputtering. The addition ofSc2O3as a dopant induces the formation of tantalum suboxide due to the “oxygen getter” property of scandium. The presence of tantalum suboxide greatly affects the optical properties of the coating, resulting in higher absorption loss atλ<#comment/>=1064nm. The refractive index and optical band gap of the mixed film do not correspond to those of a mixture ofTa2O5andSc2O3, given the profound structural modifications induced by the dopant.

Authors:
; ; ; ; ;
Award ID(s):
1708010 1708175 1707866
Publication Date:
NSF-PAR ID:
10127420
Journal Name:
Applied Optics
Volume:
59
Issue:
5
Page Range or eLocation-ID:
Article No. A106
ISSN:
1559-128X; APOPAI
Publisher:
Optical Society of America
Sponsoring Org:
National Science Foundation
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