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Title: A dry lift-off method for patterning perovskites
In this paper, we demonstrate a new method to pattern perovskites using a dry lift-off process. By utilizing parylene-C as a sacrificial layer, patterns with <12 um features and multi-color patterns can be achieved.  more » « less
Award ID(s):
1807397
NSF-PAR ID:
10165616
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Conference on Lasers and Electrooptics
ISSN:
2160-9020
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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