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In this paper, we demonstrate bursting behavior in a nonlinear microelectromechanical (MEMS) resonator that creates a frequency comb in the corresponding spectral response. The bursting behavior occurs for a single driving tone applied to the resonator. The bursting behavior arises from the non-linear analog of “level anti-crossing” in a 1:3 internal resonance that can efficiently transfer energy between two modes of a resonator at low excitation amplitudes. The internal resonance creates a region in parameter space where stable oscillations do not exist, resulting in a forbidden zone of operation.
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Nonlinear mode coupling in a MEMS resonator
A single micro-electromechanical (MEMS) resonator can be shown to exhibit behaviors unexpected in a simple resonant structure. For small driving forces, the resonator displays typical simple harmonic oscillator re- sponse. As the driving force is increased, the resonator shows the slightly more complex, but well understood, Duffing response. Rather unexpected response behavior can appear when the resonator frequency is detuned by nonlinear- ity to where two oscillatory modes of the resonator begin to interact through nonlinear coupling due to an internal resonance. The paper focuses on how the resonator response changes as the internal resonance is approached in the operating parameter space and how that behavior is conveniently represented in a bifurcation diagram. This behavior is accurately captured by a generic mathematical model. We describe an analysis of the model which shows how this coupled response varies with the system and drive parameters, especially focusing on the nonlinear coupling strength between the two modes.
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- Award ID(s):
- 1662619
- PAR ID:
- 10192162
- Date Published:
- Journal Name:
- Proceedings of SPIE
- Volume:
- Proc. SPIE 11324
- Page Range / eLocation ID:
- 1132414
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1117/12.2551883
