Amorphous tantala (
Optical coatings formed from amorphous oxide thin films have many applications in precision measurements. The Advanced Laser Interferometer Gravitational-Wave Observatory (LIGO) and Advanced Virgo use coatings of
- Publication Date:
- NSF-PAR ID:
- 10217577
- Journal Name:
- Journal of the Optical Society of America A
- Volume:
- 38
- Issue:
- 4
- Page Range or eLocation-ID:
- Article No. 534
- ISSN:
- 1084-7529; JOAOD6
- Publisher:
- Optical Society of America
- Sponsoring Org:
- National Science Foundation
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) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist or bombardment. Under the conditions of the experiment, the as-deposited thin films are amorphous and stoichiometric. The refractive index and optical band gap of thin films remain unchanged by ion bombardment. Around 20% improvement in room temperature mechanical loss and 60% decrease in absorption loss are found in samples bombarded with 100-eV . A detrimental influence from low energy bombardment on absorption loss and mechanical loss is observed. Low energy bombardment removes excess oxygen point defects, while bombardment introduces defects into the tantala films. -
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