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1. Colocalized Sensing and Intelligent Computing in Micro-Sensors

   https://doi.org/10.3390/s20216346  

   H Hasan, Mohammad; Al-Ramini, Ali; Abdel-Rahman, Eihab; Jafari, Roozbeh; Alsaleem, Fadi (November 2020, Sensors)

   null (Ed.)

   This work presents an approach to delay-based reservoir computing (RC) at the sensor level without input modulation. It employs a time-multiplexed bias to maintain transience while utilizing either an electrical signal or an environmental signal (such as acceleration) as an unmodulated input signal. The proposed approach enables RC carried out by sufficiently nonlinear sensory elements, as we demonstrate using a single electrostatically actuated microelectromechanical system (MEMS) device. The MEMS sensor can perform colocalized sensing and computing with fewer electronics than traditional RC elements at the RC input (such as analog-to-digital and digital-to-analog converters). The performance of the MEMS RC is evaluated experimentally using a simple classification task, in which the MEMS device differentiates between the profiles of two signal waveforms. The signal waveforms are chosen to be either electrical waveforms or acceleration waveforms. The classification accuracy of the presented MEMS RC scheme is found to be over 99%. Furthermore, the scheme is found to enable flexible virtual node probing rates, allowing for up to 4× slower probing rates, which relaxes the requirements on the system for reservoir signal sampling. Finally, our experiments show a noise-resistance capability for our MEMS RC scheme. 

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2. Measurements of variable capacitance using single port radio frequency reflectometry

   https://doi.org/10.1063/5.0146064  

   Celis-Cordova, Rene; Gose, Jacob J.; Brown, Abigail F.; Behn, AnnahMarie G.; Huebner, Matthew; Williams, Ethan M.; Xiang, Yang; Chisum, Jonathan D.; Orlov, Alexei O.; Snider, Gregory L. (August 2023, Review of Scientific Instruments)

   A radio frequency (RF) reflectometry technique is presented to measure device capacitances using a probe station. This technique is used to characterize micro-electromechanical system (MEMS) variable capacitor devices that can be connected to create pull-up and pull-down networks used in digital gates for reversible computing. Adiabatic reversible computing is a promising approach to energy-efficient computing that can dramatically reduce heat dissipation by switching circuits at speeds below their RC time constants, introducing a trade-off between energy and speed. The variable capacitors in this study will be measured using single port RF reflectometry achieved with a custom-made RF probe. The RF probe consists of a micromanipulator with an on-board matching network and is calibrated by measuring a capacitive bank that shows a clearly visible frequency shift with the increase in capacitance. The RF probe worked well when measuring static capacitors with no parasitic resistance; however, the frequency shift is masked when measuring the MEMS variable capacitors due to their high in-series parasitic resistance (around 80 kΩ). Therefore, RF reflectometry has the potential to measure MEMS variable capacitors in the range of 0–30 fF when not masked by a high in-series parasitic resistance, creating a fast and versatile method for characterizing variable capacitors that can be used in energy-efficient computing. 

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3. Machine Learning Augmentation in Micro-Sensor Assemblies

   https://doi.org/10.1115/DETC2020-22665  

   Hasan, Mohammad H.; Alsaleem, Fadi; Abbasalipour, Amin; Pourkamali Anaraki, Siavash; Emad-Un-Din, Muhammad; Jafari, Roozbeh (August 2020, 14th International Conference on Micro- and Nanosystems (MNS))

   null (Ed.)

   Abstract The size and power limitations in small electronic systems such as wearable devices limit their potential. Significant energy is lost utilizing current computational schemes in processes such as analog-to-digital conversion and wireless communication for cloud computing. Edge computing, where information is processed near the data sources, was shown to significantly enhance the performance of computational systems and reduce their power consumption. In this work, we push computation directly into the sensory node by presenting the use of an array of electrostatic Microelectromechanical systems (MEMS) sensors to perform colocalized sensing-and-computing. The MEMS network is operated around the pull-in regime to access the instability jump and the hysteresis available in this regime. Within this regime, the MEMS network is capable of emulating the response of the continuous-time recurrent neural network (CTRNN) computational scheme. The network is shown to be successful at classifying a quasi-static input acceleration waveform into square or triangle signals in the absence of digital processors. Our results show that the MEMS may be a viable solution for edge computing implementation without the need for digital electronics or micro-processors. Moreover, our results can be used as a basis for the development of new types of specialized MEMS sensors (ex: gesture recognition sensors). 

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4. Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry

   https://doi.org/10.1038/s41378-021-00289-4  

   Javor, Josh; Yao, Zhancheng; Imboden, Matthias; Campbell, David K.; Bishop, David J. (September 2021, Microsystems & Nanoengineering)

   Abstract The Casimir force, a quantum mechanical effect, has been observed in several microelectromechanical system (MEMS) platforms. Due to its extreme sensitivity to the separation of two objects, the Casimir force has been proposed as an excellent avenue for quantum metrology. Practical application, however, is challenging due to attractive forces leading to stiction and device failure, called Casimir pull-in. In this work, we design and simulate a Casimir-driven metrology platform, where a time-delay-based parametric amplification technique is developed to achieve a steady-state and avoid pull-in. We apply the design to the detection of weak, low-frequency, gradient magnetic fields similar to those emanating from ionic currents in the heart and brain. Simulation parameters are selected from recent experimental platforms developed for Casimir metrology and magnetic gradiometry, both on MEMS platforms. While a MEMS offers many advantages to such an application, the detected signal must typically be at the resonant frequency of the device, with diminished sensitivity in the low frequency regime of biomagnetic fields. Using a Casimir-driven parametric amplifier, we report a 10,000-fold improvement in the best-case resolution of MEMS single-point gradiometers, with a maximum sensitivity of 6 Hz/(pT/cm) at 1 Hz. Further development of the proposed design has the potential to revolutionize metrology and may specifically enable the unshielded monitoring of biomagnetic fields in ambient conditions. 

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5. MEMS-actuated metasurface Alvarez lens

   https://doi.org/10.1038/s41378-020-00190-6  

   Han, Zheyi; Colburn, Shane; Majumdar, Arka; Böhringer, Karl F. (October 2020, Microsystems & Nanoengineering)

   Abstract Miniature lenses with a tunable focus are essential components for many modern applications involving compact optical systems. While several tunable lenses have been reported with various tuning mechanisms, they often face challenges with respect to power consumption, tuning speed, fabrication cost, or production scalability. In this work, we have adapted the mechanism of an Alvarez lens – a varifocal composite lens in which lateral shifts of two optical elements with cubic phase surfaces give rise to a change in the optical power – to construct a miniature, microelectromechanical system (MEMS)-actuated metasurface Alvarez lens. Implementation based on an electrostatic MEMS generates fast and controllable actuation with low power consumption. The utilization of metasurfaces – ultrathin and subwavelength-patterned diffractive optics – as optical elements greatly reduces the device volume compared to systems using conventional freeform lenses. The entire MEMS Alvarez metalens is fully compatible with modern semiconductor fabrication technologies, granting it the potential to be mass-produced at a low unit cost. In the reported prototype operating at 1550 nm wavelength, a total uniaxial displacement of 6.3 µm was achieved in the Alvarez metalens with a direct-current (DC) voltage application up to 20 V, which modulated the focal position within a total tuning range of 68 µm, producing more than an order of magnitude change in the focal length and a 1460-diopter change in the optical power. The MEMS Alvarez metalens has a robust design that can potentially generate a much larger tuning range without substantially increasing the device volume or energy consumption, making it desirable for a wide range of imaging and display applications. 

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