In this work, we present a method to pattern liquid crystal elastomers (LCEs) in the micrometer range without using any mechanical processing steps to prepare micron sized LCE actuators compatible with microelectromechanical system (MEMS) technology. Multi-layer spin-coating processes are developed to synthesise and structure 300–3500 nm thick LCE films. A water soluble sacrificial layer, a photoalignment layer and a LCE formulation, which is polymerised and crosslinked in its liquid crystal phase, are spin-coated successively onto a substrate. A fluorinated photoresist layer is used to structure LCE films with thicknesses up to 700 nm in a photolithographic and etching process. For thicker LCE films a hard mask process, using hydrogen silsesquioxane (HSQ) as hard mask, is used. Film thicknesses and homogeneities are analysed with profilometry. Actuation motions of LCE layers are investigated before and after patterning and LCE patterns are investigated via (polarised optical) microscopy (POM), scanning electron microscopy (SEM) and profilometry. A resolution of 1.5–2.0 microns is achieved with the described techniques, which make deformable micron sized LCE actuators of variable shape and director orientation accessible. The presented results demonstrate the potential of LCEs in MEMS devices.
Digital light processing of liquid crystal elastomers for self-sensing artificial muscles
Artificial muscles based on stimuli-responsive polymers usually exhibit mechanical compliance, versatility, and high power-to-weight ratio, showing great promise to potentially replace conventional rigid motors for next-generation soft robots, wearable electronics, and biomedical devices. In particular, thermomechanical liquid crystal elastomers (LCEs) constitute artificial muscle-like actuators that can be remotely triggered for large stroke, fast response, and highly repeatable actuations. Here, we introduce a digital light processing (DLP)–based additive manufacturing approach that automatically shear aligns mesogenic oligomers, layer-by-layer, to achieve high orientational order in the photocrosslinked structures; this ordering yields high specific work capacity (63 J kg −1 ) and energy density (0.18 MJ m −3 ). We demonstrate actuators composed of these DLP printed LCEs’ applications in soft robotics, such as reversible grasping, untethered crawling, and weightlifting. Furthermore, we present an LCE self-sensing system that exploits thermally induced optical transition as an intrinsic option toward feedback control.
- Publication Date:
- NSF-PAR ID:
- 10291111
- Journal Name:
- Science Advances
- Volume:
- 7
- Issue:
- 30
- Page Range or eLocation-ID:
- eabg3677
- ISSN:
- 2375-2548
- Sponsoring Org:
- National Science Foundation
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- https://doi.org/10.1126/sciadv.abg3677
