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Title: Creating new multistep etch and deposition processes with recycled etch data using SandBox Studio AI™
Award ID(s):
1951245
PAR ID:
10356943
Author(s) / Creator(s):
; ; ;
Editor(s):
Bannister, Julie; Mohanty, Nihar
Date Published:
Journal Name:
Proc. SPIE 12056, Advanced Etch Technology and Process Integration for Nanopatterning XI
Volume:
12056
Issue:
E
Page Range / eLocation ID:
26
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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