Bannister, Julie
; Mohanty, Nihar
(Ed.)
Wet etch, dry etch, and MacEtch of β-Ga2O3: A review of characteristics and mechanism
- Award ID(s):
- 1809946
- NSF-PAR ID:
- 10377762
- Date Published:
- Journal Name:
- Journal of Materials Research
- Volume:
- 36
- Issue:
- 23
- ISSN:
- 0884-2914
- Page Range / eLocation ID:
- 4756 to 4770
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation