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Title: Wet etch, dry etch, and MacEtch of β-Ga2O3: A review of characteristics and mechanism
Award ID(s):
1809946
NSF-PAR ID:
10377762
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of Materials Research
Volume:
36
Issue:
23
ISSN:
0884-2914
Page Range / eLocation ID:
4756 to 4770
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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